2011
DOI: 10.1109/led.2010.2099204
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Bulk Planar Junctionless Transistor (BPJLT): An Attractive Device Alternative for Scaling

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Cited by 216 publications
(79 citation statements)
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“…may be used as sidewall spacer layers in nanoscale MOSFETs as they have pretty high dielectric constant, acceptable amount of conduction and valence band offsets with Si and also are thermodynamically stable with Si [9,10]. There have been many reports regarding the impact of various single high-k sidewall spacer layers on the logic and analog/RF performance of MOSFETs [5,8,11,12]. The source/drain resistance plays an important role in determining the characteristics of MOSFETs particularly at the nanodecameter technology nodes.…”
Section: Introductionmentioning
confidence: 99%
“…may be used as sidewall spacer layers in nanoscale MOSFETs as they have pretty high dielectric constant, acceptable amount of conduction and valence band offsets with Si and also are thermodynamically stable with Si [9,10]. There have been many reports regarding the impact of various single high-k sidewall spacer layers on the logic and analog/RF performance of MOSFETs [5,8,11,12]. The source/drain resistance plays an important role in determining the characteristics of MOSFETs particularly at the nanodecameter technology nodes.…”
Section: Introductionmentioning
confidence: 99%
“…Firstly, its fabrication process would be easier than the conventional MOSFETs as the intricate doping process for source and drain is avoided. Secondly, the electric field in the ON-state of the device is low [3]. Thirdly, the mobility in JLFET is improved and insensitive to the interface of gate oxide to channel due to its bulk conduction, unlike surface conduction in the inversion mode device, e.g.…”
Section: Introductionmentioning
confidence: 99%
“…A number of JLFET structures have been proposed with variations in topologies, such as single gate bulk planar JLFET [3], single gate silicon-on-insulator (SOI) JLFET [4], multi-gate nanowire junctionless transistors [5], gate-all-around nanowire junctionless transistors [6], as well as junctionless tunnel FET [7]. However, little attention is given on the gate materials in JLFET as well as the processing sequence on the gate.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, the junctionless transistor (JLT) without counter-doped metallurgical junctions has been proposed [5][6][7][8][9]. In comparison with the conventional MOSFETs, the JLT features a single-doping species at the same concentration in its source, drain, and channel.…”
Section: Introductionmentioning
confidence: 99%