1986
DOI: 10.1016/0040-6090(86)90262-2
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Cadmium tellutide etched surfaces

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Cited by 6 publications
(2 citation statements)
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“…In both these works the surface was studied using the Rutherford backscattering method. It is worth mentioning that no changes in the surface stoichiometry as compared with the bulk value were found by Dharmadaza et al [11], and Konova et al [12] observed a dependence of the surface stoichiometry on the conduction type.…”
Section: Introductionmentioning
confidence: 87%
“…In both these works the surface was studied using the Rutherford backscattering method. It is worth mentioning that no changes in the surface stoichiometry as compared with the bulk value were found by Dharmadaza et al [11], and Konova et al [12] observed a dependence of the surface stoichiometry on the conduction type.…”
Section: Introductionmentioning
confidence: 87%
“…In addition, dry etching is compatible with a closed system approach to growth, processing, and analysis of semiconductor materials and devices. The use of vapor phase etching techniques for II-VI semiconductors such as CdTe and HgCdTe is particularly desirable because of the sensitivity of these materials to the surface damage and compositional variation that can result from the wet etching process [1]. We have found that a detailed understanding of the reactions which occur during the interaction of the vapor phase reactants and the semiconductor surface is essential to the development and optimization of a dry etching procedure for these materials.…”
Section: Introductionmentioning
confidence: 99%