Calculation of the influence of electric fields on primary and secondary electrons in electron beam testing of submicron structures

Schottler, M.; Störzer, H.; Kubalek, E.

doi:10.1016/0167-9317(92)90372-x

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2006

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Cited by 7 publications

(1 citation statement)

References 9 publications

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“…A number of scientific efforts have been made to improve the quality of the voltage contrast implemented in a SEM, such as floating the ground level of a device [3], using a planar grid retarding field spectrometer [4], etc. It is believed that the local electric field [5,6], passivation [7], and specimen geometry [4,8] will affect the observation of voltage contrast.…”

Section: Introductionmentioning

confidence: 99%

Feasibility study of the application of voltage contrast to printed circuit board

Tan¹,

Gan²,

Chai³

2006

Microelectronics Reliability

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Section: Introductionmentioning

confidence: 99%

Feasibility study of the application of voltage contrast to printed circuit board

Tan¹,

Gan²,

Chai³

2006

Microelectronics Reliability

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Digital signal measurements with electric force microscope testing

Bangert

Kubalek

1999

Surf. Interface Anal.

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Principles and Applications

Thong

1993

Electron Beam Testing Technology

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The purpose of this package is to enhance the user's knowledge and ability to make decisions regarding visual assessments of watershed condition, including both narrative and photographic documentation. This Information Paper (IP) provides the principles, a brief description of methods, their applications, quality assurance practices for reducing error or subjectivity, a brief description of the Standard Operating Procedures (SOPs), and a glossary of terms used in visual assessments and other forms of citizen monitoring. The reader is referred to these SOPs for stepby-step instructions for each specific procedure. Sampling techniques for performing turbidity and transparency measurements, and flow measurements, which relate peripherally to narrative visual assessments, are also available in this Compendium.

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Calculation of the influence of electric fields on primary and secondary electrons in electron beam testing of submicron structures

Cited by 7 publications

References 9 publications

Feasibility study of the application of voltage contrast to printed circuit board

Feasibility study of the application of voltage contrast to printed circuit board

Digital signal measurements with electric force microscope testing

Principles and Applications

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