Calculation of the Reactor Impedance of a Planar-type Inductively Coupled Plasma Source

Helical and Helicon antennas are routinely used to generate inductively coupled plasmas, but there are only a few simulations or experimental data with comparisons among them. Thus, selection of the appropriate number of turns, or the type of helical or helicon antenna to use is empirical. In this paper, a comparison via simulation of various helixes and helicon antennas is presented. Full wave 3D electromagnetic analysis is performed in vacuum using a commercial software, and the electric/magnetic field component is calculated and compared for four cases of helixes, namely N = 1–4 where N is the number of turns that each helix has, as well as two helicon antennas (half and full Nagoya type). In order to reduce the capacitive coupling of these antennas an electromagnetic shield is also applied. Simulation and comparison of the shielded and unshielded antennas is given. We show that via such simulations electric and magnetic field components can be compared in order to select the appropriate antenna type for a plasma source.

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Comparison of Helical and Helicon Antennas as Sources of Plasma Excitation Using a Full Wave 3D Electromagnetic Analysis in Vacuum

Stratakos

Zeniou

Gogolides

2016

Plasma Processes & Polymers

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Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating

Kwon¹,

Kwon

et al. 2020

Physics of Plasmas

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The volume-averaged global plasma model has been widely used to analyze the characteristics of plasma, although the spatial variation of plasma parameters cannot be obtained from it. It has also been used to obtain temporal plasma parameters for pulsed plasma sources. In this work, we analyzed the effect of an edge-to-center density ratio (h factor) and an electron heating model on the plasma parameters in pulsed plasma simulations using the global model for Ar discharges. In most previous pulse simulations using the global model, the h factor has been applied to pulse conditions in the same way it has been applied to radio frequency, and the power absorbed by the electrons was assumed to be equal to the applied power. However, in this work, we considered a time-varying h factor and determined the absorbed power using an analytical electron heating model, solving the spatially averaged transport equations in a self-consistent manner. We found that a decreased h factor increases the plasma density and consequently changes the time dependence of the electron temperature. In addition, the overshoot of the electron temperature is limited at the beginning of the pulse power-on in the self-consistent electron heating model. Our results are of great relevance with respect to the analysis of plasma parameters.

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Calculation of the Reactor Impedance of a Planar-type Inductively Coupled Plasma Source

Cited by 2 publications

References 7 publications

Comparison of Helical and Helicon Antennas as Sources of Plasma Excitation Using a Full Wave 3D Electromagnetic Analysis in Vacuum

Comparison of Helical and Helicon Antennas as Sources of Plasma Excitation Using a Full Wave 3D Electromagnetic Analysis in Vacuum

Global model for pulsed inductively coupled plasma sources: Effect of edge-to-center density ratio and electron heating

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