Calculations of Mott scattering cross section

Abstract

Calculations of Mott elastic scattering cross section of electrons for most elements of the periodic table up to element number 94 in the energy range 20 eV–20 keV have been performed. The Dirac equation transformed to a first-order differential equation was solved numerically. The influence of the choice of atomic potential on the scattering factor was studied in comparison to a simple muffin-tin approximation of the atomic potential in solids. The application of calculated cross sections to a conventional Monte Carlo model for electron scattering using modified Bethe equation is described and results concerning the electron backscattering for different atomic potentials are compared.

Topographic and material contrast in low‐voltage scanning electron microscopy

“…As the primary energy is lowered below 5 keV, the distribution becomes elongated in the direction of the primary beam (Alekseev and Borisov 1962;Bronshtein et al 1972aBronshtein et al , 1972bJahrreiss and Oppel 1972;Kadlec and Eckertova 1970). This effect is caused by the change of the scattering cross section of primary electrons when the beam energy is reduced and it is more pronounced for elements with higher atomic numbers (Czyzewski et al 1990, Ichimura et al 1980, Jablonski and Gergely 1989, Kessler and Lindner 1965, Lödding and Reimer 1981, Reimer and Lödding 1984.…”

The effect of fast secondary electrons on X‐ray microanalysis in the scanning electron microscope

“…This has been done by Czyzewski et al (1990) who pointed out the crucial choice of the atomic potential on the values of Mott cross sections. From their computations, partial and total Mott elastic cross sections were computed for the first 96 elements, with incident electron energy ranging from 50 eV to 30 keV.…”

“…The differential Mott elastic cross sections are given by the following set of equations (Czyzewski et al 1990):…”

Analysis and simulation of anode heating due to electron field emission

“…Tabulated values of Mott cross-sections for elastic scattering [24] in the anode material (assumed to be aluminum) provide a means of computing scattering probabilities, elastic mean free paths for electron flight and scattering angles. Because the anode is a metal, the interior potential gradient is negligible, and the trajectory follows a straight line between collisions.…”