2004
DOI: 10.1088/0957-0233/15/2/020
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Calibrated measurement of the behaviour of mechanical junctions from micrometre to subnanometre scale: the friction force scanner

Abstract: We describe an instrument called a friction force scanner (FFS) able to perform calibrated measurements of the behaviour of mechanical junctions with more than four orders of magnitude of resolution for both displacement and force. A probe carrier is suspended by fibres in an arrangement that provides exactly two degrees of freedom of motion. The suspension makes it possible to measure the carrier displacement by interferometry. A novel differential electrostatic actuator with linear response mounted on the ca… Show more

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Cited by 11 publications
(9 citation statements)
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“…4 is used [35], [36]. In this method, the scan table and the moving combs are connected to the electrical ground, while a constant bias voltage (V dc ) plus equal and opposite voltages v and −v are applied to the opposing stationary combs in each direction, respectively.…”
Section: A Linear Actuation Mechanismmentioning
confidence: 99%
“…4 is used [35], [36]. In this method, the scan table and the moving combs are connected to the electrical ground, while a constant bias voltage (V dc ) plus equal and opposite voltages v and −v are applied to the opposing stationary combs in each direction, respectively.…”
Section: A Linear Actuation Mechanismmentioning
confidence: 99%
“…A differential actuation mechanism allows us to compensate for the quadratic nonlinearity in the electrostatic force-voltage characteristics of the comb drives [14], [15]. Since the stage and rotor combs are electrically grounded, we augment the actuation signals ±v a by 1057-7157 © 2014 IEEE.…”
Section: Sensing Mechanismmentioning
confidence: 99%
“…proportional to its capacitance C to v and to v 1 [28]. The latter value can be used to adjust the actuator constant.…”
Section: A Force Sensormentioning
confidence: 99%