1996
DOI: 10.1063/1.1147338
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Calibration and standards beamline 6.3.2 at the Advanced Light Source

Abstract: This bending magnet beamline has been in operation since February 1995 for the characterization of optical elements (mirrors, gratings, multilayers, detectors, etc.) in the energy range 50-1000 eV. Although it was designed primarily for precision reflectometry of multilayer reflecting optics for EUV projection lithography, it has capabilities for a wide range of measurements. The optics consist of a monochromator, a reflectometer, and refocusing mirrors to provide a small spot on the sample. The monochromator … Show more

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Cited by 80 publications
(43 citation statements)
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“…The XRMS measurements were performed using the reflectometer at the soft x-ray metrology bending magnet beamline 6.3.2 at the Advanced Light Source (ALS) in Berkeley, USA [27,28]. The out-of-plane elliptically polarized radiation was extracted by using a four-jaw aperture in the beamline.…”
Section: Methodsmentioning
confidence: 99%
“…The XRMS measurements were performed using the reflectometer at the soft x-ray metrology bending magnet beamline 6.3.2 at the Advanced Light Source (ALS) in Berkeley, USA [27,28]. The out-of-plane elliptically polarized radiation was extracted by using a four-jaw aperture in the beamline.…”
Section: Methodsmentioning
confidence: 99%
“…The efficiency of the grating was measured at ALS beamline 6.3.2 [21,22] to be 33%for the optimized third order diffraction. The grating profile and the results of the diffraction measurements are presented in Fig.…”
Section: New Methods For Fabrication Of Ultra-high Resolution Gratingsmentioning
confidence: 99%
“…(2) The friction tester will be installed and operated in the vacuum measurement chamber of BL-6.3.2 28 at the Advanced Light Source (ALS) under a vacuum of 10 -7 Torr. (3) The rotation speed, loading pressure, and temperature of the rotating ring can be well controlled in the vacuum chamber.…”
Section: Design Of the Friction Testermentioning
confidence: 99%