Calibration and verification of areal surface texture measuring instruments

Leach, Richard; Giusca, Claudiu; Haitjema, Han; Evans, C. J.; Jiang, Xiangqian

doi:10.1016/j.cirp.2015.05.010

Cited by 103 publications

(88 citation statements)

References 138 publications

(166 reference statements)

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“… Development of appropriate transfer standards for an improved, accurate and comprehensive assessment of the of the instruments uncertainty. These considerations generated from the direct experience of the participants involved in the comparison are in good agreement with the current state-of-the-art of calibration and verification of areal surface texture measuring instruments [3]. The experience acquired from the present comparison suggests a research roadmap in the field of areal surface texture metrology, which is also in good agreement with the recommendations for future work reported elsewhere [3].…”

supporting

confidence: 76%

“…A measurement traceability and performance verification framework for optical instruments measuring areal surface texture parameters is needed to support the quality control of surface manufacturing [3]. In order to investigate the state-ofthe-art in this area, an international comparison of optical instruments measuring polymer surfaces with sub-micrometre texture scales was carried out in the period from 2013 to 2015.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

An international comparison of surface texture parameters quantification on polymer artefacts using optical instruments

Tosello

Haitjema²,

Leach

et al. 2016

CIRP Annals

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The version presented here may differ from the published version or from the version of record. If you wish to cite this item you are advised to consult the publisher's version. Please see the repository url above for details on accessing the published version and note that access may require a subscription.For more information, please contact eprints@nottingham.ac.uk CIRP Template v4.0 An international comparison of surface texture parameters quantification on polymer artefacts using optical instruments G. Tosello (2) An international comparison of optical instruments measuring polymer surfaces with arithmetic mean height values in the sub-micrometre range has been carried out. The comparison involved sixteen optical surface texture instruments (focus variation instruments, confocal microscopes and coherent scanning interferometers) from thirteen research laboratories worldwide. Results demonstrated that: (i) agreement among different instruments could be achieved to a limited extent; (ii) standardized guidelines for uncertainty evaluation of areal surface parameters are needed for users; (iii) it is essential that the performance characteristics (and especially the spatial frequency response) of an instrument is understood prior to a measurement.Optical, Surface, Comparison

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supporting

confidence: 76%

Section: Introductionmentioning

confidence: 99%

An international comparison of surface texture parameters quantification on polymer artefacts using optical instruments

Tosello

Haitjema²,

Leach

et al. 2016

CIRP Annals

Self Cite

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“…A review of instrument brochures, technical articles and international standards reveals a lack of consensus regarding how to determine the vertical resolution, with the result that, today, its numerical specification is of questionable value [1]. This is in contrast to the steady progress in understanding and quantifying sources of uncertainty in areal surface topography measurement [2][3][4]. Although there is no formal definition for vertical resolution, instrument makers, researchers and users are asked to specify its value quantitatively.…”

Section: Introductionmentioning

confidence: 92%

The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement

Groot

2017

Applied Sciences

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Vertical resolution is the most widely quoted and most frequently misunderstood performance specification for equipment that measures surface topography. Here I propose to use internationally standardized terms and definitions for measurement noise and surface topography repeatability as more meaningful quantifiers for measurement performance. A specific example is an interference microscope operating with a 100 Hz, 1 k × 1 k pixel camera, and a sinusoidal phase modulation to convert intensity data to a height map. The measurement noise is found experimentally to be 0.072 nm for a 1 s data acquisition using a surface topography repeatability test, which determines the random height-equivalent noise level for an individual pixel in the areal surface topography map. Under ideal conditions, the measured noise is equivalent to the instrument noise that may be published in a performance specification in place of the more common, but poorly defined, vertical resolution specification.

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“…Some of the other sources are described in references [5][6][7][8], but so far, neither the results of research nor an explanation of how temperature changes influence surface topography parameters are published. There were only publications in which the authors considered thermal expansion of a device, its particular elements, and a workpiece as the factors influencing the measurements [9][10][11].…”

Section: Discussionmentioning

confidence: 99%

Influence of temperature gradient on surface texture measurements with the use of profilometry

Miller¹,

Adamczak²,

Świderski³

et al. 2017

Bulletin of the Polish Academy of Sciences Technical Sciences

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Abstract. The paper presents an analysis of influence of ambient temperature changes on the values of parameters in topography measurements with the use of different profilometry techniques. In order to check this, a series of measurements was performed. Two multiprofilometry instruments were used -a contact profilometer, further equipped with an interferometric transducer, and an optical one with a confocal probe. Measurements were performed on first-class flat interferometric glass and on an A-type roughness standard -under different conditions, with simultaneous registration of differences in ambient temperature values. These values were either intentionally changed or the temperature variations were the result of air conditioning control. The performed research showed that -despite the asperities on the surface being really small -there is a relationship between changes of temperature and the results obtained from the measured surface, which in some cases can be seriously distorted.

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Calibration and verification of areal surface texture measuring instruments

Cited by 103 publications

References 138 publications

An international comparison of surface texture parameters quantification on polymer artefacts using optical instruments

An international comparison of surface texture parameters quantification on polymer artefacts using optical instruments

The Meaning and Measure of Vertical Resolution in Optical Surface Topography Measurement

Influence of temperature gradient on surface texture measurements with the use of profilometry

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