Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard

Groot, Peter J. de; Beverage, Jake

doi:10.1117/12.2184975

Cited by 5 publications

(6 citation statements)

References 13 publications

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“…Figure 1 shows a schematic of the interferometric microscope (Zygo Nexview NX2, see disclaimer), modified to enable the in situ calibration of the vertical amplification coefficient. [11] For these measurements, we use a 5.5x Michelson interferometer objective with a numerical aperture NA = 0.15. During calibration, a 3 nm narrow-band spectral filter is inserted in the illumination path, and the effective NA of the objective is reduced by an illumination aperture conjugate to the back focal plane of the objective.…”

Section: The Instrumentmentioning

confidence: 99%

“…Using the Michelson interferometer objective with this light source enables calibration of the vertical motion by varying objective height z with respect to a highly polished and flat SiC mirror [11]. Figure 2 shows the interferogram obtained in this fashion averaged over a small 42 × 42 pixel region at the center of the field.…”

Section: Calibration Of the Amplification Coefficientmentioning

confidence: 99%

“…Calibration of the linear component, the amplification coefficient [8][9][10], is often performed using a calibrated physical artifact, typically a step-height standard. De Groot and Beverage proposed a method for performing an absolute calibration of the amplification coefficient for interferometric microscopes that does not require a step-height standard [11]. In their method, a narrow-band spectral filter is inserted into the illumination path, the effective numerical aperture of the objective is reduced, and the interferometric objective is used with an optical flat in the sample position as a Fourier transform spectrometer to measure the filter spectrum at the sample location.…”

Section: Introductionmentioning

confidence: 99%

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Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement

Germer,

Renegar,

Griesmann

et al. 2024

Surf. Topogr.: Metrol. Prop.

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The vertical scale calibration of an interferometric microscope is important for establishing traceability of surface topography measurements to the International System of Units (SI) unit of length, the meter. Building on the calibration procedure for the amplification coefficient developed by de Groot and Beverage [Proc. SPIE 9526, 952610 (2015)], this paper describes a calibration procedure that yields the response curve for the entire vertical scan motion of a coherent scanning interferometric microscope. The method requires only a flat mirror as an artifact, a narrow band spectral filter, an aperture to reduce the effective numerical aperture, and the ability to raise and lower the microscope head so that the center of the interferogram can be varied within the scan range. The local frequency of the interferogram is determined by fitting sections of the interferogram to a sinusoidal function. The nonlinearity determined from the local frequency data can be used to estimate the uncertainty in uncorrected vertical height measurements. We describe how optical profile data can be corrected for nonlinearity due to dynamic effects in the scan motion and show that the correction improves the reproducibility of step height measurements by at least a factor of three and close to that of the repeatability.

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Section: The Instrumentmentioning

confidence: 99%

Section: Calibration Of the Amplification Coefficientmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement

Germer,

Renegar,

Griesmann

et al. 2024

Surf. Topogr.: Metrol. Prop.

View full text Add to dashboard Cite

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“…Figure 4 gives the traceability chain for an interferometer system that operates based on a spectral lamp, illustrating the definition of traceability [11]. Such a system can be used for topography measurements and, because of its small uncertainty, used for calibration of step height standards that are subsequently used for the calibration of other surface topography measuring instruments.…”

Section: Calibration and Traceabilitymentioning

confidence: 99%

Why you should pay attention to international standards in optical metrology

de Groot,

Haitjema,

Malburg

2023

Applied Optical Metrology V

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Optical metrology is a driving force in advancing industries ranging from consumer electronics to components for energy and transportation. Despite this progress, there is considerable wasted effort attributable to misleading instrument specifications, inconsistent calibrations, and ambiguous data processing procedures. Confusing statements of accuracy and uncertainty, inconsistencies in filtering and parameter calculations, and misunderstandings about measurement principles and limitations undermine confidence in measurement results. A greater awareness and use of international standards documents can improve the situation, leading to a wider adoption of optical methods. At the same time, there is a critical need for stronger engagement in the development of new standards by experts in optics and photonics.

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“…are equally acceptable, depending on the capabilities of the instrumentation. Example techniques include those based on an independent realisation of the metre using a natural emission wavelength, the value for which has been established with a known uncertainty [90,91].…”

Section: Materials Measuresmentioning

confidence: 99%

Metrological characteristics for the calibration of surface topography measuring instruments: a review

Leach

Haitjema

et al. 2020

Meas. Sci. Technol.

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The multinational Arabidopsis research community is highly collaborative. This has been demonstrated through global efforts to publish the Arabidopsis genome sequence in 2000; the long-term support for the three international stock centres in the United States, United Kingdom and Japan; and in the development of community-facing informatics resources such as The Arabidopsis Information Resource (TAIR), the Bio-Analytic Resource for Plant Biology (BAR), the Munich Information Centre for Protein Sequences (MIPS), the International Arabidopsis Informatics Consortium (IAIC), and Araport. The Multinational Arabidopsis Steering Committee (MASC) has represented this global community through its joint oversight of the annual International Conference on Arabidopsis Research (ICAR); production of a MASC annual report 1 ; and preparation of a series of decadal roadmaps that have helped coordinate the future

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Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard

Cited by 5 publications

References 13 publications

Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement

Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement

Why you should pay attention to international standards in optical metrology

Metrological characteristics for the calibration of surface topography measuring instruments: a review

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