Camera-based metrology of subwavelength scatterers in photonic integrated circuits

Howard, Tyler V.; Brown, Thomas G.

doi:10.1117/12.2601478

Cited by 2 publications

(1 citation statement)

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“…The scattered light from PICs has long been known and applied to track signal paths using a microscopecamera setup. 24,25 However, the stochastic nature of the scattering process lends little information useful for quantitative diagnostics. Grating couplers, tap/detector combinations, and near-field probes have all been used to deterministically sample the amount of guided light, but each suffer from their own drawbacks in either additional steps in the fabrication process or take up a large amount of chip area.…”

Section: Introductionmentioning

confidence: 99%

Silicon photonics packaging using engineered scattering elements

Howard

Brown

2023

Silicon Photonics XVIII

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Accurate monitoring of the polarization within a waveguide is key to verifying the polarization fidelity in photonic integrated circuits and in verifying polarization during fiber alignment. Current testing methods require either a combined input/output fiber attachment or a tap/detector combination. These measure the coupled power but cannot monitor the polarization state near individual components. We have designed and tested foundrycompatible optical test-points for polarization monitoring. We study scatterers both for SiN and Si waveguides fabricated in the AIM Photonics foundry. We observe strong polarization effects in the light scattered from these elements when designed in certain geometries. When viewed with a short-wave infrared microscope, captured images displayed extinction values up to 30x between orthogonal polarizations for the engineered scattering elements. Finite-difference time-domain simulations were performed for each scattering element, corroborating experimental measurements but showing that even higher extinctions may be possible with further refinement.

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Section: Introductionmentioning

confidence: 99%