TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300422
|View full text |Cite
|
Sign up to set email alerts
|

Cantilever-Based Tactile Sensor with Improved Sensitivity for Dimensional Metrology of Deep Narrow Drillings

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2008
2008
2019
2019

Publication Types

Select...
4
2
1

Relationship

0
7

Authors

Journals

citations
Cited by 7 publications
(2 citation statements)
references
References 4 publications
0
2
0
Order By: Relevance
“…A mathematical objective function that corresponded to sensor accuracy was applied to design an optimal multi-axis force sensor [19]. Then, in the design of a cantilever-based tactile sensor with a piezoresistive stress sensing element, force sensitivity was optimised by introducing a nonconducting island in a p-well [20]. In [21], finite element (FE) analysis was applied to a tactile sensor based on optoelectronic technology to select the optimal sensor geometry sensitive to contact forces.…”
Section: Related Workmentioning
confidence: 99%
“…A mathematical objective function that corresponded to sensor accuracy was applied to design an optimal multi-axis force sensor [19]. Then, in the design of a cantilever-based tactile sensor with a piezoresistive stress sensing element, force sensitivity was optimised by introducing a nonconducting island in a p-well [20]. In [21], finite element (FE) analysis was applied to a tactile sensor based on optoelectronic technology to select the optimal sensor geometry sensitive to contact forces.…”
Section: Related Workmentioning
confidence: 99%
“…Axial loading results from moving the cantilever with its free end against a fixed body. Three modes of deflection of an axially loaded cantilever which have been implemented in MEMS technology (Beyeler et al, 2008;Ruther et al 2007;Samuel et al, 2006) are schematically shown in Fig. 4 where cantilevers fixed to a support by clamping (left), a hinge (middle) and a spring (right) are depicted.…”
Section: Axial Loadingmentioning
confidence: 99%