IEEJ Trans. SM
 2012
DOI: 10.1541/ieejsmas.132.103
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Cantilever-type Thermal Microactuators Fabricated by SOI-MUMPs with U-type and I-type Configurations

Takahiro Osada
1
,
Kuniyuki Ochiai
2
,
Kazuki Osada3
et al.
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Study on MEMS Thermal Microactuators with Pedestal‐Type Beam Shape and Au Electroplating

Ochiai1,
Osada2,
Muro
3
2014
Elect Comm in Japan
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Study on MEMS Thermal Microactuators with Pedestal‐Type Beam Shape and Au Electroplating

Ochiai1,
Osada2,
Muro
3
2014
Elect Comm in Japan
Self Cite
0
0
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