Cantilever‐Type Thermal Microactuators Fabricated by SOI‐MUMPs with U‐Type and I‐Type Configurations

Abstract

SUMMARY Recently, micro fluid systems have been studied extensively, and microactuators such as micro valves fabricated using MEMS technology are essential for realizing these systems. This paper describes an investigation of thermal microactuators with U‐type and I‐type shapes fabricated by SOI‐MUMPs technology in order to optimize their configurations. © 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(12): 46–51, 2013; Published online in Wiley Online Library (http://wileyonlinelibrary.com). DOI 10.1002/ecj.11500

Study on MEMS Thermal Microactuators with Pedestal‐Type Beam Shape and Au Electroplating

“…While various types of microactuators have been developed, including piezoelectric types , electromagnetic types , electrostatic types , and thermal types , we focused on thermal microactuators, which can facilitate simpler structures and allow larger displacement than other microactuators, and we studied the possibilities of U‐type and I‐type devices . In this paper, we describe thermal microactuators which have a pedestal‐type beam shape modified from the I‐type and a thicker electroplated Au layer, developed in order attain much larger displacements.…”