Cantillever based MEMS pressure sensor

Abstract

Objective: We are analyzing the different piezoelectric materials which are best sutable combination for the design of pressure sensors used for the production of voltage.Our main theme is to find which combination gives high voltage. Methods:We are incorporating different layers on the cantilever beam such as piezoelectric material (PZT,BaTiO3), electrode(Pt,Al), insulator(Si3N4) on siliconwafer(SiO2). We had used these materials for MEMS pressure sensor utilizing diverse [different] Piezoelectric materials The relative study by simulation can be utilized to give the rules to a configuration and streamlining of execution of the distinctive piezoelectric micro cantilever pressure sensors. Findings:.We have designed, displayed and simulated our module in COMSOL software taking into account limited component strategy [FEM]. The structure made up of silicon on piezoelectric micro cantilever with cantilever beam. In reenactment [simulation] we have concentrated on varying so as to displacement and voltage connected pressure. It is observed that the induced voltage is practically straight [linear] with the applied force Improvement:From this design we analysed that at particular dimensions of materialswithcombinationofPZTand Al gives best voltage than remaining combinations like PZT and Pt.

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

“…(1998) investigated the resonance behaviour of a cantilever oscillating in a quiescent viscous fluid and described the influence on the resonance frequency and the quality factor by means of a hydrodynamic function. Using the approximation of the hydrodynamic function of Maali et al (2005) the resonance frequency can be described by…”

“…To describe the influence of the surrounding medium, the prediction of the forces acting on the oscillator is of crucial importance. This influence has been investigated in various studies (Sader, 1998;Hiroshi et al, 1995;Maali et al, 2005;Naeli et al, 2009). The emerging forces are described by the increase in mass caused by the moving fluid and the hydrodynamic damping.…”

6.3.3 Bestimmung des Mischungsverhältnisses eines strömenden Gasgemisches

“…Sie sind einige µm große freistehende Zungen, die infolge von Krafteinwirkungen und Masseanlagerungen Änderungen in ihrem mechanischen Verhalten erfahren. Sie bieten ein weites Spektrum für sensorische Aufgaben: Raster-Kraft-Sensoren mit atomarer Auflösung, Kraft-und Drucksensoren, Beschleunigungssensoren, Massesensoren, Temperatursensoren, IR-Strahlungssensoren, bio-und chemische Sensoren, Strömungssensoren [1][2][3]. Auf Grund der Möglichkeit diese resonanten MEMS-Sensoren extrem klein zu bauen, sind sie in der Lage Kräfte im nN-Bereich, Massen im fg-Bereich und Abmessungen im sub nm-Bereich erfassen zu können.…”