Capacitive pressure sensor in post-processing on LTCC substrates

Meijerink, M.G.H.; Nieuwkoop, E.; Veninga, E.P.; Meuwissen, Mhh Marcel; Tijdink, M.W.W.J.

doi:10.1016/j.sna.2005.04.026

Cited by 13 publications

(6 citation statements)

References 2 publications

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“…The ceramic tape consists of alumina particles and glass particles suspended in an organic binder, which is subsequently fired to form a ceramic structure. [9][10][11] The typical peak sintering temperature of LTCC is 800°C-950°C. 12 The major fabrication processes are shown in Figure 6.…”

Section: Fabrication Of the Sensormentioning

confidence: 99%

Passive wireless pressure sensor fabricated in low-temperature co-fired ceramic technology

Yang

Liu

Xiong

et al. 2014

Proceedings of the Institution of Mechanical Engineers, Part N:

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A passive wireless pressure sensor based on low-temperature co-fired ceramic was investigated. The sensor is equivalent to a LC resonant circuit, which has a planar spiral inductor and an interdigital capacitor electrically connected. The inductor and capacitor are fabricated by screen printing technology. The working principle of the sensor is based on the pressure-sensitive resonant frequency of the LC circuit. Wireless detection can be realized by electromagnetic coupling with two inductor coils. The results show that the resonant frequency of sensor decreases with the increase in pressure, and sensitivity of the sensor is about 412.32 kHz/bar.

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Section: Fabrication Of the Sensormentioning

confidence: 99%

Passive wireless pressure sensor fabricated in low-temperature co-fired ceramic technology

Yang

Liu

Xiong

et al. 2014

Proceedings of the Institution of Mechanical Engineers, Part N:

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“…In addition to the packaging method, guide pipes have been used for pressure measurement in an engine running test, which usually cause signal distortion compared to the results obtained from in situ measurement. Therefore, further studies have focused on fabricating sensors by high-temperature-resistant materials such as ceramics [7][8][9], silicon on insulator (SOI) [10], and SiC [11][12][13]. Among these sensors, wireless passive pressure sensors realized by low-temperature cofired ceramic (LTCC) and high-temperature cofired ceramic (HTCC) technology have demonstrated great prospects owing to the combination of passive a telemetry readout method and temperature-resistant material properties.…”

Section: Introductionmentioning

confidence: 99%

A Passive Pressure Sensor Fabricated by Post-Fire Metallization on Zirconia Ceramic for High-Temperature Applications

et al. 2014

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A high-temperature pressure sensor realized by the post-fire metallization on zirconia ceramic is presented. The pressure signal can be read out wirelessly through the magnetic coupling between the reader antenna and the sensor due to that the sensor is equivalent to an inductive-capacitive (LC) resonance circuit which has a pressure-sensitive resonance frequency. Considering the excellent mechanical properties in high-temperature environment, multilayered zirconia ceramic tapes were used to fabricate the pressure-sensitive structure. Owing to its low resistivity, sliver paste was chosen to form the electrical circuit via post-fire metallization, thereby enhancing the quality factor compared to sensors fabricated by cofiring with a high-melting-point metal such as platinum, tungsten or manganese. The design, fabrication, and experiments are demonstrated and discussed in detail. Experimental results showed that the sensor can operate at 600 °C with quite good coupling. Furthermore, the average sensitivity is as high as 790 kHz/bar within the measurement range between 0 and 1 Bar. OPEN ACCESSMicromachines 2014, 5 815

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“…Compatibility of a thick film and LTCC technologies enables the fabrication of conductive paths and passive components on the surface and buried configurations. The technique is used to fabricate multilayer electronic circuits, sensors, actuators, and microsystems . Fabrication of three‐ dimensional shapes in LTCC ceramics is one of the most important technological steps.…”

Section: Introductionmentioning

confidence: 99%

Application of Design of the Experiment in Preliminary Investigations on the end Milling of Low Temperature Co‐fired Ceramics

Jurków

Gołonka

2012

Int J Applied Ceramic Tech

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The formation of three-dimensional shapes is one of the most important technological steps in low temperature co-fired ceramics (LTCC) process. Channels and chambers qualities and the process speed are strongly affected by the shaping procedure. There are three main machining techniques: laser cutting, punching, and milling. This article is dedicated to end milling process of LTCC tapes. The determined PS/DK 2 3 experiment design was used in the investigations and its procedure is described in this article. The used procedure is a very flexible method to achieve much useful information about the influence of the process parameters on the output. The PS/DK 2 3 experiment design enables analysis of the influence of: the three input parameters on the output (minimal obtained feature) and the interaction between the input parameters on the output (minimal obtained feature). Moreover, PS/DK 2 3 experiment design enables to obtain the mathematical model of the milling process and to decrease the number of measurements demanded to achieve the correct model. Hence, the design is suitable to decrease the time and costs of the experiment. The influence of the following input parameters: spindle rotational speed, spindle feed rate, vertical spindle step, and cutter diameter on minimal obtained feature of LTCC tapes is analyzed in this article. *dominik.jurkow@pwr.wroc.pl

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Capacitive pressure sensor in post-processing on LTCC substrates

Cited by 13 publications

References 2 publications

Passive wireless pressure sensor fabricated in low-temperature co-fired ceramic technology

Passive wireless pressure sensor fabricated in low-temperature co-fired ceramic technology

A Passive Pressure Sensor Fabricated by Post-Fire Metallization on Zirconia Ceramic for High-Temperature Applications

Application of Design of the Experiment in Preliminary Investigations on the end Milling of Low Temperature Co‐fired Ceramics

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