2015
DOI: 10.1016/j.proeng.2015.08.652
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Capacitive vs Piezoresistive MEMS Gyroscopes: A Theoretical and Experimental Noise Comparison

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Cited by 8 publications
(2 citation statements)
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“…Angular velocity can be numerically integrated to obtain rotation, but MIMUs designed for human motion analysis are based on low-cost microelectromechanical technology that also suffers from substantial noise and bias over the measurement [ 5 ]. This noise and bias particularly affects the angular velocity measure, [ 6 ] such that the estimation of the orientation by numerical integration leads to a well-known error: orientation drift [ 7 ]. To improve the orientation calculation, the sensor’s data are then combined [ 8 ], the linear acceleration and the magnetic field being used to correct the initial estimate obtained by numerical integration of the angular velocity [ 7 ].…”
Section: Introductionmentioning
confidence: 99%
“…Angular velocity can be numerically integrated to obtain rotation, but MIMUs designed for human motion analysis are based on low-cost microelectromechanical technology that also suffers from substantial noise and bias over the measurement [ 5 ]. This noise and bias particularly affects the angular velocity measure, [ 6 ] such that the estimation of the orientation by numerical integration leads to a well-known error: orientation drift [ 7 ]. To improve the orientation calculation, the sensor’s data are then combined [ 8 ], the linear acceleration and the magnetic field being used to correct the initial estimate obtained by numerical integration of the angular velocity [ 7 ].…”
Section: Introductionmentioning
confidence: 99%
“…It can be suppressed by optimizing the structural design parameters and vacuum packaging. In contrast, the circuit noise is relatively complicated [7][8][9][10] , the noise source mainly comes from the noise introduced by the circuit and each module of the system, such as RC noise, amplifier, multiplier, quantization noise of ADC / DAC, cut off of digital circuit noise and so on. In addition, the noise of the circuit is much larger than the mechanical thermal noise, which plays a major role in the total noise, therefore, this paper analyzes the noise model of the front-end readout circuit, op amp circuit and ADC / DAC circuit module in detail, in order to guide the parameter design of the circuit system, the corresponding mathematical theory is deduced and the corresponding experimental data are given.…”
Section: Introductionmentioning
confidence: 99%