Capturing micro-assembly process windows on process data sheets

Tichem, Marcel; Bourgeois, F.; Lambert, Pierre; Vandaele, Vincent; Lang, Defeng

doi:10.1109/isatp.2005.1511453

Cited by 6 publications

(3 citation statements)

References 11 publications

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“…The terms A d , A r and A t represent the area of the driving electrode, the ground electrode and the total area respectively. From equation (2), by varying the applied potentials (V), the contact angle (θ 1 ) between the liquid bridge and the gripper surface can be manipulated. At V = 0 the Teflon AF R coated gripper surface is hydrophobic; the contact angle is maximum and the lifting force is minimum.…”

Section: Description Of the Capillary Grippermentioning

confidence: 99%

“…Capillary forces dominant at the micro scale have been utilized as the gripping mechanism to overcome these drawbacks [1]. Capillary lifting forces generated by a liquid bridge between a gripper surface and an object were used to lift and hold micro scale objects typically having a weight of a few milligrams [2]. One drawback of these capillary microgrippers is that objects are difficult to release because the lifting force remains constant once the liquid bridge is formed.…”

Section: Introductionmentioning

confidence: 99%

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Soft microgripping using ionic liquids for high temperature and vacuum applications

Amin¹,

Jagtiani²,

Vasudev³

et al. 2011

J. Micromech. Microeng.

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Aqueous droplet-based micro-gripper has been used for micro-assembly. However they cannot be used for high temperature and vacuum applications. Ionic liquids, organic salts that have a lower melting point temperature, appear suitable for droplet-based micro-gripping application in high temperature and vacuum environments because of their nonvolatility and thermal stability. In this paper, we demonstrated the use of ionic liquid as the operating liquid for micro-gripping applications in high temperatures (up to 110 • C) and vacuum (up to 24 inch Hg) environments. Electrowetting was utilized to dynamically change the contact angle of a 1-butyl-3-methylimidazolium hexafluorophosphate (BmimPF6) liquid bridge to control the capillary lifting forces. The lifting force generated by the liquid bridge was experimentally characterized. The range of capillary lifting forces can be adjusted by changing the liquid bridge height and droplet volume to pick up and release objects with different weights. The dynamic response of the BmimPF6 liquid bridge was also characterized.

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Section: Description Of the Capillary Grippermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Soft microgripping using ionic liquids for high temperature and vacuum applications

Amin¹,

Jagtiani²,

Vasudev³

et al. 2011

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…A few capillary grippers have been developed to pick up and release silicon chips [9] and sub-millimetric-sized watch bearing balls [10]. Capillary grippers take advantage of capillary lifting force evolving from a liquid bridge between two surfaces [11]. One challenge for the capillary gripper is that once an object is picked up, the capillary lifting force resulting from a liquid bridge remains constant; thus, the object is difficult to release.…”

Section: Introductionmentioning

confidence: 99%

A low-voltage droplet microgripper for micro-object manipulation

Vasudev

Jagtiani

et al. 2009

J. Micromech. Microeng.

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We present a low-voltage microgripper utilizing a liquid droplet to pick up and release micro-objects. Lifting force is generated by a liquid bridge formed between the gripper surface and an object. Electrowetting was used to dynamically change the capillary lifting forces and enable easy object release. The driving voltage was applied to a pair of coplanar interdigitated electrodes, eliminating the need for an electrode on top of the droplet and thus significantly facilitating object manipulation. A barium strontium titanate insulation layer was used to lower the driving voltage. Experiments indicated that the lifting forces can be as high as 213 μN at a driving voltage of 28 V. Experiments also demonstrated a low-voltage, low power consumption soft microgripper by picking up and releasing micro glass beads.

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An electrowetting based microgripper

Vasudev

Zhe

2008

2008 51st Midwest Symposium on Circuits and Systems

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Capturing micro-assembly process windows on process data sheets

Cited by 6 publications

References 11 publications

Soft microgripping using ionic liquids for high temperature and vacuum applications

Soft microgripping using ionic liquids for high temperature and vacuum applications

A low-voltage droplet microgripper for micro-object manipulation

An electrowetting based microgripper

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