Carbon doped α-Al2O3 coatings grown by chemical vapor deposition

Hochauer, D.; Mitterer, Christian; Penoy, M.; Puchner, S.; Michotte, C.; Martinz, H.P.; Hutter, Herbert; Kathrein, M.

doi:10.1016/j.surfcoat.2012.03.059

Cited by 22 publications

(5 citation statements)

References 23 publications

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“…Aluminum oxide (Al 2 O 3 ) is a material that can form phases with high elastic modulus and hardness in bulk materials as well as in thin films. , For instance, Ruppi et al have reported on the deposition of α-Al 2 O 3 films with Young’s moduli of 424–444 GPa and hardness levels of 27.8–28.9 GPa. Al 2 O 3 is also a good gas diffusion barrier, − and therefore can be used in barrier coatings to protect materials from mechanical damages and ambient influence.…”

Section: Introductionmentioning

confidence: 99%

“…Even more easily, α-Al 2 O 3 can be obtained on appropriate seed layers where the Al 2 O 3 films are deposited on. For instance, α-Al 2 O 3 has been grown at 1000 °C on Ti(C,N) and Ti 3 O 5 /Ti 4 O 7 surfaces by chemical vapor deposition (CVD), ,,, at 700 °C on α-Fe 2 O 3 formed during thermal oxidation of metal alloys that contain Fe and Al, and at 700–750 °C on CrN in magnetron sputtering (MS) experiments . Using the MS method and α-Al 2 O 3 as a component of a sputtering target, α-Al 2 O 3 films have been obtained on silicon substrates at 550 °C .…”

Section: Introductionmentioning

confidence: 99%

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Low-Temperature Atomic Layer Deposition of α-Al₂O₃ Thin Films

Aarik

Mändar

Ritslaid

et al. 2021

Crystal Growth & Design

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The atomic layer deposition of Al 2 O 3 films on Si(100) and α-Cr 2 O 3 was studied. The films were grown via AlCl 3 -H 2 O, AlCl 3 -O 3 , Al(CH 3 ) 3 -H 2 O, and Al(CH 3 ) 3 -O 3 processes at 300−750 °C. The films deposited from AlCl 3 and H 2 O at temperatures ≥ 400 °C on α-Cr 2 O 3 contained the corundum phase of alumina (α-Al 2 O 3 ). The densities and refractive indices of the α-Al 2 O 3 films were close to the corresponding values of single-crystal α-Al 2 O 3 and exceeded markedly those of amorphous Al 2 O 3 . The α-Al 2 O 3 phase was also obtained in the films deposited at 450 °C on α-Cr 2 O 3 from AlCl 3 and O 3 and from Al(CH 3 ) 3 and H 2 O. However, the crystallinity, densities, and refractive indices of the latter films were lower than those of the films deposited at 450 °C on α-Cr 2 O 3 from AlCl 3 and H 2 O. Etching in hot (110 °C) 80% H 2 SO 4 was used to characterize the chemical resistance of the films in aggressive environments. The etching rate of α-Al 2 O 3 deposited at 450−750 °C was more than 1000 times lower than that of predominantly amorphous Al 2 O 3 , and also lower than those of the films that were grown on Si(100) at 750 °C and contained γ-Al 2 O 3 , δ-Al 2 O 3 , and/or θ-Al 2 O 3 .

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Low-Temperature Atomic Layer Deposition of α-Al₂O₃ Thin Films

Aarik

Mändar

Ritslaid

et al. 2021

Crystal Growth & Design

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“…CVD coating techniques are preferred for coating SiAlON inserts because of the strength of the bonds that are created between the SiAlON substrate and the interatomic bonding layer. Previous studies [20][21][22][23][24][25] deduced that chemical vapour deposition is the most suitable method for creating thin-film coatings that have high durability and high wear resistance at high cutting temperatures. The benefit of the chemical vapour deposition coating process is that it allows for a high enough temperature to be reached on the surface of the heated substrate.…”

Section: Introductionmentioning

confidence: 99%

Tribological Properties of Multilayer CVD Coatings Deposited on SiAlON Ceramic Milling Inserts

Osmond

Cook

Slatter

2023

JMMP

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This work characterises the structure and mechanical properties, such as adhesion, of two different chemical vapour deposition (CVD) coatings deposited onto silicon aluminium oxynitride (Si3N4 + Al2O3 + Y2O3) round (RNGN) milling cutter tooling inserts. These inserts are often known by the trade abbreviation “SiAlON”. Wear was produced on the inserts using unidirectional sliding (pin-on-disc type) and scratch testing. Two coatings were investigated: a multilayer CVD coating (Coating A) with a composition of TiN + TiCN + Al2O3 and a bilayer coating (Coating B) with a composition of Al2O3 + TiN. Microstructural analysis was conducted after wear testing and Coating B demonstrated high stability when subjected to high alternating shear and tensile stresses, high abrasion resistance and very high adhesion to the SiAlON ceramic insert substrate when compared to Coating A. Coating A demonstrated a low capacity to distribute alternating shear and tensile stresses during the pin-on-disc and scratch testing, which led to failure. The scratch and pin-on-disc results from this study correlate highly with completed machining insert wear analysis that has used Coating A and Coating B SiAlON inserts to machine aged Inconel 718.

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“…Alumina ceramic coating has the advantages of excellent wear resistance, high hardness, and melting point. [1][2][3] It has become a hot research topic of hard coating materials that are widely applied in the mechanical industries field. Graphene has attracted more and more attention in the field of metal reinforcement and ceramic toughening.…”

Section: Introductionmentioning

confidence: 99%

“…Alumina ceramic coating has the advantages of excellent wear resistance, high hardness, and melting point 1–3 . It has become a hot research topic of hard coating materials that are widely applied in the mechanical industries field.…”

Section: Introductionmentioning

confidence: 99%

Tribological behavior of GNPs doped Al₂O₃ coating fabricated by SHVOF thermal spraying on cemented carbide

Sun

Liu

et al. 2022

Int J Applied Ceramic Tech

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This paper aims to experimentally investigate the effect of graphene nanoplatelets (GNPs) doped Al 2 O 3 coating deposited on the surface of cemented carbide substrate using suspension high velocity oxy fuel (SHVOF) thermal spraying technique. Scanning electron microscopy was applied to characterize GNPs doped Al 2 O 3 feedstock, the surface morphologies of cemented carbide before and after spraying, and the wear track morphology of cemented carbide after wear tests. The phases of GNPs doped Al 2 O 3 feedstock, uncoated and coated cemented carbide were analyzed by X-ray diffraction. The existence of GNPs was analyzed by Raman spectroscopy. A mixture of un-molten and molten splats formed on the surface of cemented carbide substrate after SHVOF thermal spray. The average coefficient of friction (CoF) of coated samples was slightly lower than that of uncoated samples, which might be due to the friction-reduction effect of GNPs. The wear rate of the samples was one order of magnitude higher than that of the alumina ball, showing that the wear of samples was the main wear between the friction couples. The wear mechanism of uncoated sample was mainly fatigue spalling, and that of cemented carbide substrate coated with GNPs doped Al 2 O 3 coating was mainly plowing and abrasive wear.

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Carbon doped α-Al2O3 coatings grown by chemical vapor deposition

Cited by 22 publications

References 23 publications

Low-Temperature Atomic Layer Deposition of α-Al₂O₃ Thin Films

Low-Temperature Atomic Layer Deposition of α-Al₂O₃ Thin Films

Tribological Properties of Multilayer CVD Coatings Deposited on SiAlON Ceramic Milling Inserts

Tribological behavior of GNPs doped Al₂O₃ coating fabricated by SHVOF thermal spraying on cemented carbide

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Carbon doped α-Al2O3 coatings grown by chemical vapor deposition

Cited by 22 publications

References 23 publications

Low-Temperature Atomic Layer Deposition of α-Al2O3 Thin Films

Low-Temperature Atomic Layer Deposition of α-Al2O3 Thin Films

Tribological Properties of Multilayer CVD Coatings Deposited on SiAlON Ceramic Milling Inserts

Tribological behavior of GNPs doped Al2O3 coating fabricated by SHVOF thermal spraying on cemented carbide

Contact Info

Product

Resources

About

Low-Temperature Atomic Layer Deposition of α-Al₂O₃ Thin Films

Low-Temperature Atomic Layer Deposition of α-Al₂O₃ Thin Films

Tribological behavior of GNPs doped Al₂O₃ coating fabricated by SHVOF thermal spraying on cemented carbide