Carbon nanotube integrated 3-dimensional carbon microelectrode array by modified SU-8 photoresist photolithography and pyrolysis

Integration of MnO2 thin film and carbon nanotubes to three-dimensional carbon microelectrodes for electrochemical microcapacitors

“…In the next step, photolithography process as shown in Fig. 1b and c was conducted to fabricate CNT-integrated SU-8 posts, and the details were reported previously [25,26]. In this work, the photolithography process was further improved.…”

“…Recently, our group introduced a facile approach to fabricate CNT-integrated carbon microelectrodes by photolithography of CNTs modified SU-8 photoresist and pyrolysis [25]. The 3D carbon structures showed great potential for on-chip electrochemical applications.…”

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH2O2Decomposition

“…Multiwalled carbon nanotube microarray membranes (CNT-MMs) fabricated by this method thereby provide a versatile microstructure for reagentbased burst-propulsion. Thus, this distinct CNT-templated microfabrication process enables the growth of aligned, high aspect ratio CNT microchannel membranes ; a three-dimensional microstructure that cannot be formed from conventional, stand-alone CNT fabrication techniques such as screen-printing, 26,27 electropraying, 28 alcohol catalytic chemical vapor deposition, 29 plasma-enhanced chemical vapor deposition, 30À32 selfassembled monolayer linking, 33 and thermal crosslinking. 34 Electroless deposition of Pt onto CNTs has been demonstrated in the literature; CNT-MM structures can be functionalized in like manner to provide highly catalytic microstructures for burst-propulsion applications.…”

Carbon-MEMS based rectangular channel microarrays embedded pencil trace for high rate and high-performance lithium-ion battery application

“…Sharma et.al reported RF 4 gel derived 3D cross-shaped and cylindrical shaped geometry and suspended SU-8 carbon nanofiber over carbon posts by a simple and efficient electrospinning method 16 . Other reports show carbon nanowire integrated CMEMS 17 ; binder-free advanced matrixes nanostructured electrodes 18 ; the integration of SWNT/MWNT on carbon posts 19 . A few reports show thin film deposition on the carbon posts by a sputtering method 20,21 .…”