2008
DOI: 10.1088/0957-4484/19/21/215706
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Carbon nanotube thermal interface material for high-brightness light-emitting-diode cooling

Abstract: Aligned carbon nanotube (CNT) arrays were fabricated from a multilayer catalyst configuration by microwave plasma-enhanced chemical vapor deposition (PECVD). The effects of the thickness and annealing of the aluminum layer on the CNT synthesis and thermal performance were investigated. An experimental study of thermal resistance across the CNT array interface using the modified ASTM D5470 standard was conducted. It was demonstrated that the CNT-thermal interface material (CNT-TIM) reduced the thermal interfaci… Show more

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Cited by 144 publications
(64 citation statements)
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“…[1][2][3][4] Carbon nanotubes (CNTs), with extremely high intrinsic thermal conductivity [5][6][7] and expected as one of the best thermal interface materials (TIMs), [8][9][10] have been directly synthesized on silicon substrates, [10][11][12][13] aiming to improve the heat dissipation in Si-based electronics. However, the experimentally measured interfacial thermal conductance is exceptionally low, 14,15 which is not promising enough for efficient energy dissipation.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4] Carbon nanotubes (CNTs), with extremely high intrinsic thermal conductivity [5][6][7] and expected as one of the best thermal interface materials (TIMs), [8][9][10] have been directly synthesized on silicon substrates, [10][11][12][13] aiming to improve the heat dissipation in Si-based electronics. However, the experimentally measured interfacial thermal conductance is exceptionally low, 14,15 which is not promising enough for efficient energy dissipation.…”
Section: Introductionmentioning
confidence: 99%
“…This is significantly higher than copper where k is 400 W/m·K. Furthermore, the thermal contact resistance of CNT arrays with a copper interface is reported to be only about 10 mm 2 K/W [4]. Thus, CNTs are exhibiting very promising results for usage as a TIM.…”
Section: Introductionmentioning
confidence: 99%
“…Simple and efficient methods for growing highly aligned and densely packed CNTs on silicon surfaces were demonstrated in [4]. Horizontal and vertical aligned CNTs were presented in [5].…”
Section: Introductionmentioning
confidence: 99%
“…While many examples are available of growing vertical CNT at moderate to low temperatures using CVD for the fabrication of CNT test vias [5,14e19,12], or thermal interface materials [20,21], none of these examples demonstrates the possibility of growing CNT directly on existing electronic circuits. In this work we integrated CNT, grown using Co on TiN support layers, as vertical interconnects into a monolithic 3D IC process in order to demonstrate the possibility of the direct integration of CNT in IC.…”
Section: Introductionmentioning
confidence: 99%