Centering electrostatic microgripper and magazines for microassembly tasks

Hesselbach, J.; Buettgenbach, Stephanus; Wrege, Jan; Buetefisch, Sebastian; Graf, Christiane

doi:10.1117/12.444126

Cited by 31 publications

(28 citation statements)

References 14 publications

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“…Due to its predictable nature, compatibility with vacuum equipment, and simple application, the electrostatic attachment has also been heavily studied (Gengenbach and Boole, 2000;Feddema et al, 2002;Enikov and Lazarov, 2003;Hesselbach et al, 2003). Numerous variants of the electrostatic attachment are possible, as illustrated in Figure 7.…”

Section: Electrostatic Grippersmentioning

confidence: 99%

Micro- and Nano-assembly and Manipulation Techniques for MEMS

Enikov

2006

Microsystems Mechanical Design

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This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.

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Section: Electrostatic Grippersmentioning

confidence: 99%

Micro- and Nano-assembly and Manipulation Techniques for MEMS

Enikov

2006

Microsystems Mechanical Design

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“…However, the use of these grippers may induce residual stresses strains and charges on the handled micro-components [3]. Electrostatic force actuated grippers have been used for micro-material handling purposes by Neugebauer et al [4] in the assembly of piezo-ceramic sensors; by Fantoni [5] in the handling of metallic cylinders; and by Hesselbach et al [6] in the picking and placing of glass spheres. However, the electrostatic forces may leave residual charges on the handled parts and in some cases an energy supply is required [3,7].…”

Section: Introductionmentioning

confidence: 99%

Silver, Copper and Aluminium Coatings for Micro-Material Handling Operations

Matope

Rabinovich³

2013

sajie

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Micro-material handling has challenges accompanying it because of adhesive forces, which make the picking and placing of micro-parts difficult. The adhesive forces hinder the picking of a micro-part, and once picked, they pose even a greater challenge when attempts to release a micro-part are made. Van der Waals' forces are part of the adhesive forces and are always present between interacting surfaces in a micro-material handling operation. However, Van der Waals' forces can profitably be manipulated in a micromaterial handling operation. The paper reveals how the Van der Waals' forces can be advantageously used in micro-material handling operations involving silver, copper and aluminium coatings of rms surface roughness values ranging from 0.5 nm to 2.72 nm, which are produced by the electron beam evaporation (e-beam) method. These were found to exert Van der Waals' forces ranging from 17 nN to 314 nN, which can be used for reliable micro-material handling operations. OPSOMMINGDie hantering van materiaal op 'n mikroskaal het uitdagings wat daarmee gepaard gaan as gevolg van kleefkragte. Kleefkragte bemoeilik die optel van 'n mikro-onderdeel en, wanneer dit eers opgetel is, is daar selfs ŉ groter uitdaging wanneer die part geplaas en gelos moet word. Van der Waalskragte vorm deel van die kleefkragte en is altyd teenwoordig tussen opervlaktes wat met mekaar in aanraking kom wanneer mikro-materiale gehanteer word. Van der Waalskragte kan egter voordelig gemanipuleer word in 'n mikromateriaalhanteringsituasie. Hierdie artikel toon hoedat Van der Waalskragte voordelig gebruik kan word wanneer silwer-, koper-en aluminiumbedekkings met 'n wgk oppervlakgrofheid tussen 0.5 nm en 2.72nm, wat deur die elektronstraalverdamping (e-straal) metode geproduseer word, gehanteer moet word. Daar is gevind dat hierdie bedekkings Van der Waalskragte tussen 17nN en 314nN uitoefen. Die Van der Waalskragte kan gebruik word vir betroubare mikro-materiaalhantering.

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“…In the literature, several solutions to these manipulation problems can be found, including hybrid-type grippers where two principles are integrated in order to reduce the adhesive force during the release [2], grippers based on physical principles peculiar of the microscale that control and exploit the adhesive forces [3] [4], and handling systems without physical contacts between the gripper and the component, in order to avoid stiction [5]. Among the strategies proposed for the micromanipulation there are: phase transition [6], magnetic [5], van der Waals [7], electrostatic [3][8], adhesive and capillary interactions [4][9]- [12] suction [13], and laser [14].…”

Section: Introductionmentioning

confidence: 99%

“…Among the strategies proposed for the micromanipulation there are: phase transition [6], magnetic [5], van der Waals [7], electrostatic [3][8], adhesive and capillary interactions [4][9]- [12] suction [13], and laser [14]. Each of these solutions has its own advantages and drawbacks, mainly concerning the cost, accuracy, repeatability, compliancy, versatility and complexity.…”

Section: Introductionmentioning

confidence: 99%

Handling and Manipulation of Microcomponents: Work-Cell Design and Preliminary Experiments

Ruggeri

Fontana²,

Pagano³

et al. 2012

Precision Assembly Technologies and Systems

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Abstract. The paper introduces an experimental setup for the automatic manipulation of microcomponents, based on a 4 dof robot with Shoenflies motion and a two-camera vision system. The general architecture of the workcell is presented. The work-cell functionality was tested via repeatability experiments using a set of vacuum grippers. Due to their intrinsic simplicity, vacuum grippers are very cheap and appear a promising solution for micromanipulation. An innovative nozzle for a vacuum gripper was designed, fabricated and tested, comparing its performance with traditional needles. The design was conceived to reduce the frequency of occlusions of the gripper and handle a wide range of particles. The performed tests evaluate the success and precision of the part release. Indeed, this is a crucial aspect of micromanipulation because microparts tend to stick to the gripper preventing the successful performance of manipulation tasks. The results confirm that adhesive effects prevent the release of components. For this reason different strategies were adopted in order to improve the efficiency in the release of stuck components. This solution increases the percentage of release and, setting appropriately the intensity of the pressure, it does not affect negatively the accuracy nor the repeatability of the positioning.

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Centering electrostatic microgripper and magazines for microassembly tasks

Cited by 31 publications

References 14 publications

Micro- and Nano-assembly and Manipulation Techniques for MEMS

Micro- and Nano-assembly and Manipulation Techniques for MEMS

Silver, Copper and Aluminium Coatings for Micro-Material Handling Operations

Handling and Manipulation of Microcomponents: Work-Cell Design and Preliminary Experiments

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