Ceramic Pressure Sensor for High Temperatures – Investigation of the Effect of Metallization on Read Range

Abstract

A first realization of membranes by draping a graphite insert with ceramic green body sheets, and a study on the relationship between circuit metallization, made by doublelayer screen-printing of platinum and electroplating of silver on top of platinum, and the practical read range of ceramic LC resonators for high-temperature pressure measurements, are presented. As a quality factor reference, two-port microstrip meander devices were positively evaluated. To study interdiffusion between silver and platinum, test samples were annealed at 500, 700, and 900 °C for 4, 36, 72, and 96 hours. The LC resonators were fabricated with both metallization methods, and the practical read range at room temperature was evaluated. Pressure sensitive membranes were characterized for pressures up to 2.5 bar at room temperature, 500 and up to 900°C. Samples electroplated with silver exhibited performance equal to or better than double-layer platinum samples for up to 60 hours at 500°C, 20 hours at 700°C, and for 1 hour at 900°C, which was correlated with the degree of interdiffusion as determined from crosssectional analysis. The LC resonator samples with double-layer platinum exhibited a read range of 61 mm, and the samples with platinum and silver exhibited a read range of 59 mm. The lowest sheet resistance, and, thereby, the highest read range of 86 mm, was obtained with a silver electroplated LC resonator sample after 36 hours of annealing at 500°C.

Systematic variation of design aspects for a significant increase in thermal fracture resistance of alumina microthrusters

“…The two different heater patterns used to achieve heating at central and peripheral areas, respectively, were designed based on thermography images of similar heater designs presented in [20]. Component thickness was chosen within the range of 300-1100 µm found for HTCC microcomponents in literature [8][9][10][11][12][13][16][17][18], many of which also contain cavities with single-sheet membranes [16,17,20,21].…”

“…The co-fired ceramics technology is now established in microfabrication and has, for example, been used for realization of temperature [8], flow [9], pressure [10] and gas [11] sensors. The technology is divided into low-and hightemperature co-fired ceramics (LTCC and HTCC, respectively), where components made using the latter tolerate the highest temperatures of the two.…”

Enhancing the electric charge output in LiNbO3-based piezoelectric pressure sensors

“…Besides, compared to other types of pressure sensors, piezoelectric pressure sensors are characterized by a wide bandwidth, passivity, good dynamic characteristics, high sensitivity, and a simple structure. [4][5][6][7] Therefore, there are some reports on the study of piezoelectric modules or other self-actuated modules and their integration in capacitive 8 and piezoresistive 9 pressure sensors. However, compared with piezoelectric pressure sensors, these are usually complex in structure or have higher requirements for the internal structural properties of the material.…”

A Ku-Band Miniaturized System-in-Package Using HTCC for Radar Transceiver Module Application

“…Ceramic material products have developed rapidly in recent years and have been widely used in many fields [1][2][3][4][5][6][7][8]. Ceramic package products have high packaging density, good electrical and thermal performance, and high reliability [9,10].…”