Ceramic Thick Films for MEMS

Dorey, Robert A.; Whatmore, R. W.

doi:10.1007/0-387-23319-9_9

Cited by 4 publications

(3 citation statements)

References 86 publications

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“…to exhibit a maximum in the piezoelectric response and are typically used in MEMS device applications. For fabrication of thicknesses between 1 and 100 μm, many thick film deposition techniques of PZT have been used such as screen printing, composite sol-gel, electrophoretic deposition, thick film sol-gel, direct writing and ceramic paint as Dorey and Whatmore outlined in [55]. Thick film techniques require very high temperatures (600-1200 • C) which can raise concerns with high diffusion speeds of atomic species.…”

Section: Deposition Growth and Properties Of Piezoelectric Materialsmentioning

confidence: 99%

Piezoelectric MEMS sensors: state-of-the-art and perspectives

Tadigadapa¹,

Mateti

2009

Meas. Sci. Technol.

520

257

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Over the past two decades, several advances have been made in micromachined sensors and actuators. As the field of microelectromechanical systems (MEMS) has advanced, a clear need for the integration of materials other than silicon and its compounds into micromachined transducers has emerged. Piezoelectric materials are high energy density materials that scale very favorably upon miniaturization and that has led to an ever-growing interest in piezoelectric films for MEMS applications. At this time, piezoelectric aluminum-nitride-based film bulk acoustic resonators (FBAR) have already been successfully commercialized. Future innovations and improvements in inertial sensors for navigation, high-frequency crystal oscillators and filters for wireless applications, microactuators for RF applications, chip-scale chemical analysis systems and countless other applications hinge upon the successful miniaturization of components and integration of piezoelectrics and metals into these systems. In this article, a comprehensive review of micromachined piezoelectric transducer technology will be presented. Piezoelectric materials in bulk and thin film forms will be reviewed and fabrication techniques for the integration of these materials for microsensor applications will be presented. Recent advances in various piezoelectric microsensors will be presented through specific examples. This review will conclude with a critical assessment of the future trends and promise of this technology.

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Section: Deposition Growth and Properties Of Piezoelectric Materialsmentioning

confidence: 99%

Piezoelectric MEMS sensors: state-of-the-art and perspectives

Tadigadapa¹,

Mateti

2009

Meas. Sci. Technol.

520

257

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“…According to Fujifilm Dimatix surface tension should be around 30 mN/m. To avoid clogging, maximum particle size should be at least 100 times smaller than the nozzle diameter [16]. In case of Dimatix DMP-3000 nozzle diameter is 21.5 µm, therefore particle size should not exceed 215 nm.…”

Section: Methodsmentioning

confidence: 99%

Inkjet patterning of in situ sol–gel derived barium titanate thin films

Tripkovic

Vukmirović

Bajac

et al. 2016

Ceramics International

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“…This frequency dependence of the relative permittivity contributes to that, in any given material, a number of polarization sources will activate at different frequencies [21]. Considering that the electronic and atomic effects do not change significantly, dipolar, space charge, and ionic are the main contributors to polarization mechanism arising at RF frequencies of interest [22].…”

Section: Considerations On Permittivity Conductivity and Electromentioning

confidence: 99%

Electromagnetic Technique for Hydrocarbon and Sand Transport Monitoring: Proof of Concept

Arellano

Hunt²,

Ma³

2020

IEEE Access

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Electromagnetic metering offers significant promise in the measurement of low-conductivity medium like in multiphase flow. Such measurements rely on the measurement of conductivity contrasts formed by two medium of substances, one substance being conductive and the other being non-conductive. In these conditions, it is assumed that the permittivity-induced displacement current is small compared to eddy current induced by conductivity, therefore the displacement current is usually ignored. The present study demonstrates, through solution of the electromagnetic forward problem and pilot tests, that the temporal, spatial and frequency related permittivity and conductivity changes are all captured by the induced electrical voltage measurement. Permittivity reflects in the amplitude and the conductivity reflects both in the amplitude and the phase angle of the voltage. The weight of each parameter to the voltage measurement is studied here. The findings of the study disclose that an electromagnetic metering system may offer advantages in continuously monitoring and measuring hydrocarbon contents and solid concentrations via both the amplitude and phase shift changes.

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Ceramic Thick Films for MEMS

Cited by 4 publications

References 86 publications

Piezoelectric MEMS sensors: state-of-the-art and perspectives

Piezoelectric MEMS sensors: state-of-the-art and perspectives

Inkjet patterning of in situ sol–gel derived barium titanate thin films

Electromagnetic Technique for Hydrocarbon and Sand Transport Monitoring: Proof of Concept

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