Channel waveguides fabrication in Er³⁺-doped tellurite glass by ion beam irradiation

Very low loss reactively ion etched Tellurium Dioxide planar rib waveguides for linear and non-linear optics

“…However, planar tellurite devices have, until now, proven to be rather problematic. There have been a number of reports [20][21][22][23][24][25][26][27][28][29] of planar waveguides fabricated in tellurite glasses using techniques such as UV direct write [20,21], femtosecond laser direct write [22][23][24], ion exchange [25][26][27], ion implant [28], and sputter etching [29]. Whilst some of these methods have realized small channel waveguides, propagation losses were high (lowest reported loss of 1.3dB/cm [24]) and there are no reports of losses even approaching 0.2dB/cm, about the maximum allowable for useful linear or non-linear optical integrated devices.…”

Nonlinear silicon photonics on CMOS-compatible tellurium oxide

“…However, fabrication of integrated tellurium oxide has been challenging thus far. In the first half of the last two decades, there were significant attempts at fabricating TeO 2 waveguides, for example, using femtosecond laser writing, ion exchange, ion implantation, and reactive ion etching methods [33,[39][40][41][42]. However, for nonlinear photonics, such devices have had limited success either due to high propagation loss, weak guidance, or large mode area of the pump limiting the overall optical intensity for efficient nonlinear signal conversion.…”

Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

“…Fabrication of channel (Berneschi et al, 2007a;Khánh et al, 2009) and slab (Berneschi et al, 2011) waveguides on this glass (doped with Er 3+ ) using 1.5 MeV N + ions (fluences in the range 5x10 12 to 8x10 16 cm -2 ) have been reported by Berneschi and collaborators. Optical characterization revealed that the implanted layer exhibited a decrease of the refractive index with respect to the virgin bulk glass, while the region comprised between the sample surface and the end of the ion track acted as an optical guiding structure.…”