Chapter 2 Principles of Uncooled Infrared Focal Plane Arrays

Kruse, Paul W.

doi:10.1016/s0080-8784(08)62688-5

Cited by 81 publications

(57 citation statements)

References 29 publications

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“…[164,165] According to the transduction princi-ples, IR detectors can be classified broadly as quantum (opto-electronic) and thermal. [166][167][168] Thermal IR detectors, in turn, can be based on pyroelectric, [169] thermoelectric, thermoresistive (bolometers), [170][171][172][173][174] and micromechanical transducers. [104,[175][176][177][178][179][180][181][182][183] Bimaterial microcantilevers can also be used to turn heat into a mechanical response and can be referred to as thermo-mechanical detectors.…”

Section: Uncooled Thermal Sensorsmentioning

confidence: 99%

Bimaterial Microcantilevers as a Hybrid Sensing Platform

et al. 2008

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Microcantilevers, one of the most common MEMS structures, have been introduced as a novel sensing paradigm nearly a decade ago. Ever since, the technology has emerged to find important applications in chemical, biological and physical sensing areas. Today the technology stands at the verge of providing the next generation of sophisticated sensors (such as artificial nose, artificial tongue) with extremely high sensitivity and miniature size. The article provides an overview of the modes of detection, theory behind the transduction mechanisms, materials employed as active layers, and some of the important applications. Emphasizing the material design aspects, the review underscores the most important findings, current trends, key challenges and future directions of the microcantilever based sensor technology.

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Section: Uncooled Thermal Sensorsmentioning

confidence: 99%

Bimaterial Microcantilevers as a Hybrid Sensing Platform

et al. 2008

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“…The pixel•s DC response, in terms of " V/W, was measured at a range of bias currents from 10 nA to 600 nA. The responsivity, R v , can be expressed using Equation 1, where ± is the temperature coefficient of resistance (TCR), · is the absorption magnitude, R is the resistance of the microbolometer, I B is the bias current, G th is the thermal conductance, É is the angular modulation frequency and Ä is the thermal time constant [27]…”

Section: Fpa Characterizationmentioning

confidence: 99%

“…The noise equivalent power (NEP) of a bolometer is equal to the root-mean-square (rms) noise output voltage per square root unit bandwidth of the micro-bolometer divided by the responsivity, as described by Equation 3 [27].…”

Section: Fpa Characterizationmentioning

confidence: 99%

Metamaterial-Based Terahertz Imaging

Carranza

Grant

Gough

et al. 2015

IEEE Trans. THz Sci. Technol.

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Abstract-This article presents the design of an innovative, low-cost, uncooled, metamaterial based terahertz (THz) focal plane array (FPA). A single pixel is composed of a resonant metamaterial absorber and micro-bolometer sensor integrated in a standard 180 nm CMOS process. The metamaterial is made directly in the metallic and insulating layers available in the six metal layer CMOS foundry process. THz absorption is determined by the geometry of the metamaterial absorber which can be customized for different frequencies. The initial prototype consists of a 5 x 5 pixel array with a pixel size of 30 µm x 30 µm and is readily scalable to more commercially viable array sizes. The FPA imaging capability is demonstrated in a transmission and reflection mode experiment by scanning a metallic object hidden in a manila envelope.

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“…The micromachining techniques are used to suspend the thermo-sensing element above the substrate in a bridge structure to minimize the heat lost by thermal conduction through the substrate; Fig. 1(a) shows a scheme of one microbolometer structure [8]. A number of books and reviewed articles on IR technology have been published in recent years [1,8,9].…”

Section: Introductionmentioning

confidence: 99%

“…1(a) shows a scheme of one microbolometer structure [8]. A number of books and reviewed articles on IR technology have been published in recent years [1,8,9]. However any specialized of IR sensor based on amorphous materials.…”

Section: Introductionmentioning

confidence: 99%

An overview of uncooled infrared sensors technology based on amorphous silicon and silicon germanium alloys

Ambrosio

Moreno

Mireles

et al. 2010

Phys. Status Solidi (c)

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At the present time there are commercially available large un‐cooled micro‐bolometer arrays (as large as 1024×768 pixels) for a variety of thermal imaging applications. Different thermo‐sensing materials have been employed as thermo sensing elements as Vanadium Oxide (VOx), metals, and amorphous and polycrystalline semiconductors. Those materials present good characteristics but also have some disadvantages. As a consequence none of the commercially available arrays contain optimum pixels with an optimum thermo‐sensing material. This paper reviews the development of the un‐cooled bolometer technology and the research achievements on this area, with special attention on the key factors that would lead to improve the pixels performance characteristics. The work considers the R&D of microbolometer arrays and the integration with MEMS and IC technologies. A comparative study with the state of the art and data reported in literature is presented. Finally, further directions of uncooled bolometer based in thin films materials are also discussed in this paper. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Chapter 2 Principles of Uncooled Infrared Focal Plane Arrays

Cited by 81 publications

References 29 publications

Bimaterial Microcantilevers as a Hybrid Sensing Platform

Bimaterial Microcantilevers as a Hybrid Sensing Platform

Metamaterial-Based Terahertz Imaging

An overview of uncooled infrared sensors technology based on amorphous silicon and silicon germanium alloys

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