Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications

Zhou, Jiayu; DeMiguel-Ramos, M.; Garcia‐Gancedo, Luis; Iborra, E.; Olivares, J.; Jin, Hao; Luo, Jikui; Elhady, A.S.; Dong, Shurong; Wang, Diming; Fu, Yong Qing

doi:10.1016/j.snb.2014.05.066

Cited by 46 publications

(29 citation statements)

References 43 publications

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“…On the other hand, surface acoustic wave (SAW) resonators are crucial components for communications [7], micro-sensors [8], microfluidics [9], and lab-on-a-chip applications [10]. SAW devices are usually fabricated on rigid substrates such as silicon, quartz, LiNbO3 [11], and LiTaO3 [12], which are not suitable to fabricate flexible SAW devices.…”

Section: Introductionmentioning

confidence: 99%

Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil

Liu

Luo

Zhao

et al. 2016

IEEE Trans. Electron Devices

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Section: Introductionmentioning

confidence: 99%

Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil

Liu

Luo

Zhao

et al. 2016

IEEE Trans. Electron Devices

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“…11 However, AlN for SAW application is inherently limited by its low electromechanical coupling coefficient (K 2 ) in the range of normally less than 1%, 12 which is particularly critical for SAW-based applications such as sensors, actuators, and SAW-based microfluidics. 13 Akiyama et al recently revealed that 43% scandium, Sc, doping in AlN can result in more than a 400% increase in piezoelectric moduli d 33 . 14 Tasn adi et al conducted a theoretical analysis and confirmed a significant improvement in piezoelectric properties of AlScN.…”

mentioning

confidence: 99%

High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Wang

Mayrhofer

et al. 2014

Applied Physics Letters

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AlN and AlScN thin films with 27% scandium (Sc) were synthesized by DC magnetron sputtering deposition and used to fabricate surface acoustic wave (SAW) devices. Compared with AlN-based devices, the AlScN SAW devices exhibit much better transmission properties. Scandium doping results in electromechanical coupling coefficient, K2, in the range of 2.0% ∼ 2.2% for a wide normalized thickness range, more than a 300% increase compared to that of AlN-based SAW devices, thus demonstrating the potential applications of AlScN in high frequency resonators, sensors, and high efficiency energy harvesting devices. The coupling coefficients of the present AlScN based SAW devices are much higher than that of the theoretical calculation based on some assumptions for AlScN piezoelectric material properties, implying there is a need for in-depth investigations on the material properties of AlScN.

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“…Acoustic heating is a common phenomenon in SAW-based devices. Although the wave displacement of the LiNbO 3 substrate is only a few nanometers [31], very high frequency mechanical vibration (20 MHz) causes a large temperature increase. Since the speed of the SAW depends on the substrate temperature, acoustic heating causes a change in the operating frequency and performance of the F-SAW device.…”

Section: Thermal Measurement Results Of the Saw Device In Air And Watermentioning

confidence: 99%

“…This phenomenon can be explained as follows. Despite relatively small displacement of the lithium niobate (LiNbO 3 ) surface due to SAW propagation (only a few nanometers) [31]), very high frequency mechanical vibration (20 MHz) causes a large temperature increase, which deteriorates the performance of SAW devices. Thus, these issues should be addressed in order to increase the benefits of SAW-based devices, and ensure their high efficiency and minimized costs [32,33].…”

Section: Introductionmentioning

confidence: 99%

Heat Transfer Characteristics of a Focused Surface Acoustic Wave (F-SAW) Device for Interfacial Droplet Jetting

Lee

Choi

et al. 2018

Inventions

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Abstract:In this study, we investigate the interfacial droplet jetting characteristics and thermal stability of a focused surface acoustic wave device (F-SAW). An F-SAW device capable of generating a 20 MHz surface acoustic wave by applying sufficient radio frequency power (2-19 W) on a 128 • -rotated YX-cut piezoelectric lithium niobate substrate for interfacial droplet jetting is proposed. The interfacial droplet jetting characteristics were visualized by a shadowgraph method using a high-speed camera, and a heat transfer experiment was conducted using K-type thermocouples. The interfacial droplet jetting characteristics (jet angle and height) were analyzed for two different cases by applying a single interdigital transducer and two opposite interdigital transducers. Surface temperature variations were analyzed with radio frequency input power increases to evaluate the thermal stability of the F-SAW device in air and water environments. We demonstrate that the maximum temperature increase of the F-SAW device in the water was 1/20 of that in the air, owing to the very high convective heat transfer coefficient of the water, resulting in prevention of the performance degradation of the focused acoustic wave device.

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Characterisation of aluminium nitride films and surface acoustic wave devices for microfluidic applications

Cited by 46 publications

References 43 publications

Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil

Annealing Effect on Structural, Functional, and Device Properties of Flexible ZnO Acoustic Wave Sensors Based on Commercially Available Al Foil

High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

Heat Transfer Characteristics of a Focused Surface Acoustic Wave (F-SAW) Device for Interfacial Droplet Jetting

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