Characteristics of c-axis oriented large grain ZnO films prepared by low-pressure MO-CVD method

Kashiwaba, Y.; Sugawara, Katsutoshi; Haga, Koichi; Watanabe, Hideo; Zhang, B.P; Segawa, Y.

doi:10.1016/s0040-6090(02)00193-1

Cited by 51 publications

(13 citation statements)

References 10 publications

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“…Precursors employed can be organic or inorganic chemicals, which can be in different phases including gas, liquid or solid. The precursors which are naturally occurring in gaseous states, such as NH3 as source of nitrogen [36], [37], O2 or CO2 as source of oxygen [38], [39] and others, are directly inserted into the reactor. A Mass flow controller (MFC) is used for controlling the flow rate.…”

Section: Precursormentioning

confidence: 99%

CVD Chemistry of Organoborons for Boron-Carbon Thin Film Depositions

Imam¹

2017

Linköping Studies in Science and Technology. Dissertations

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Section: Precursormentioning

confidence: 99%

CVD Chemistry of Organoborons for Boron-Carbon Thin Film Depositions

Imam¹

2017

Linköping Studies in Science and Technology. Dissertations

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“…Such precursors could be NH 3 as source of nitrogen [45,46], O 2 or CO 2 as source of oxygen [47,48], metal chlorides or metalorganics as sources of metals like Ti (TiCl 4 ), B (trimethyl boron (TMB), BCl 3 ), Ga (triethyl gallium) and other [49,50,51] The reaction cell consisting of a graphite susceptor or just a sample holder can be heated inductively by the radio frequency (RF) coil or by a resistive heater. Precursors (NH 3 and Triethyl boron (TEB)) are diluted by the carrier gas (H 2 in this work) and are Adjusting the flows of precursors and carrier gas enables control of the precursor ratio and their concentrations in the gas mixture that allow for the manipulation of supersaturation.…”

Section: Chemical Vapour Depositionmentioning

confidence: 99%

Chemical Vapour Deposition of sp2 Hybridised Boron Nitride

Chubarov¹

2014

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The aim of this work was to develop a chemical vapour deposition process and understand the growth of sp 2 hybridised Boron Nitride (sp 2 -BN). Thus, the growth on different substrates together with the variation of growth parameters was investigated in details and is presented in the papers included in this thesis. Deposited films of sp 2 -BN were characterised with the purpose to determine optimal deposition process parameters for the growth of high crystal quality thin films with further investigations of chemical composition, morphology and other properties important for the implementation of this material towards electronic, optoelectronic devices and devices based on graphene/BN heterostructures.For the growth of sp 2 -BN triethyl boron and ammonia were employed as B and N precursors, respectively. Pure H 2 as carrier gas is found to be necessary for the growth of crystalline sp 2 -BN. Addition of small amount of silane to the gas mixture improves the crystalline quality of the growing sp 2 -BN film.It was observed that for the growth of crystalline sp 2 -BN on c-axis oriented -Al 2 O 3 a thin and strained AlN buffer layer is needed to support epitaxial growth of sp 2 -BN, while it was possible to deposit rhombohedral BN (r-BN) on various polytypes of SiC without the need for a buffer layer. The growth temperature suitable for the growth of crystalline sp 2 -BN is 1500 °C. Nevertheless, the growth of crystalline sp 2 -BN was also observed on -Al 2 O 3 with an AlN buffer layer at a lower temperature of 1200 °C. Growth at this low temperature was found to be hardly controllable due to the low amount of Si that is necessary at this temperature and its accumulation in the reaction cell. When SiC was used as a substrate at the growth temperature of 1200 °C, no crystalline sp 2 -BN was formed, according to X-ray diffraction.Crystalline structure investigations of the deposited films showed formation of twinned r-BN on both substrates used. Additionally, it was found that the growth on Om man skulle kunna göra ljusdioder av BN skulle dessa sända ut ljus med en våglängd på cirka 220 nm alltså den typen av ultraviolettljus (UV) som ozonlagret filtrerar bort från solen. Av sådana ljusdioder skulle man sedan kunna göra vita ljusdioder genom att använda en luminofor, vilket är ett material som absorberar UV-ljus och sedan sänder ut vitt ljus, men ännu mera spännande skulle det vara att använda ljusdioderna för vattenrening då denna typ av UV-ljus dödar bakterier.Eftersom BN bildar samma kristallstrukturer som kol, så är den grafitlika, sp 2 -hybridiserade formen av BN mycket intressant att använda tillsammans med grafen.Beräkningar har visat att om man använder sp 2 -BN som substrat till grafen så kommer man åt större del av de förutspådda materialegenskaperna för grafen än om man använder andra substrat.Syftet med detta arbete har varit att utveckla en syntesprocess för tunna filmer av sp 2 -BN med tillräckligt hög kvalité för att kunna börja utforska alla möjligheter med BN, för detta har en teknik som kal...

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“…Many preparing methods such as thermal evaporation, 4,5) chemical vapor deposition (CVD) 6) are employed to synthetize nano and microstructure ZnO with various exciting shapes in the past few decades. Nevertheless, each of these preparation methods may have one or more shortages, such as being involved vacuum environment, complicated processes or high temperature, which may result in low crystallinity, impurity or poor dispersion.…”

Section: Introductionmentioning

confidence: 99%

Hydrothermal Synthesis of Different Zinc Oxide Nanostructures: Growth, Structure and Gas Sensing Properties

Wang

Liu

2012

Mater. Trans.

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We report the nanostructures and gas-sensing properties of Zinc oxide nanosheets prepared by hydrothermal method. In particular, needlelike Zinc oxide was also prepared for comparison. The morphology and structural properties were investigated using X-ray diffraction (XRD), scanning electron microscope (SEM) and transmission electron microscope (TEM). Subsequent gas-sensing measurement between Zinc oxide nanosheets and Zinc oxide nanoaciculars indicated that the nanosheets exhibited higher gas response to ethanol. The enhanced gas sensing properties of Zinc oxide nanosheets suggests that governing the shape and the surface structure of nano Zinc oxide is a significant approach for developing high performance gas sensors.

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Characteristics of c-axis oriented large grain ZnO films prepared by low-pressure MO-CVD method

Cited by 51 publications

References 10 publications

CVD Chemistry of Organoborons for Boron-Carbon Thin Film Depositions

CVD Chemistry of Organoborons for Boron-Carbon Thin Film Depositions

Chemical Vapour Deposition of sp2 Hybridised Boron Nitride

Hydrothermal Synthesis of Different Zinc Oxide Nanostructures: Growth, Structure and Gas Sensing Properties

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