Characteristics of carbon nanotubes grown by mesh-inserted plasma-enhanced chemical vapor deposition

A novel hybrid method combining ASP with PECVD for in - situ low temperature synthesis of vertically aligned carbon nanotube films

“…Some studies have been carried out to obtain CNTs at low temperature and to establish the mechanism involved [4,[16][17][18][19][20][21][22][23][24][25][26][27][28]. However, there are still some uncertainties of the products by low temperature synthesis process, such as the transition from CNT to carbon nanofiber (CNF) [16], diameter variation, and so on.…”

“…After all, sufficient energy is required to grow CNTs, for the decomposition of hydrocarbon gases and the subsequent diffusion and precipitation. Researchers attempted to supply activation energy by adjusting the plasma field under the low temperature growth condition, and several researchers reported some promising results [18][19][20]30]. However, high energy ions can restrict the growth of CNTs due to the ion bombardment induced etching effect by plasma.…”

“…In some cases, researchers achieved the growth of VACNT films at a relatively low temperature by adding grids [18,20] connected to an additional electrode. Kojima et al indicated that high energy ions can restrict the growth of CNTs and the grid electrode is helpful to suppress the etching effect of plasma [20], while neutral carbon atoms can pass through and react with the catalysts [30,31].…”

“…Kojima et al indicated that high energy ions can restrict the growth of CNTs and the grid electrode is helpful to suppress the etching effect of plasma [20], while neutral carbon atoms can pass through and react with the catalysts [30,31]. No CNTs or only few stubby CNTs can be formed without the use of additional electrode mainly due to the ion bombardment [18].…”

P‐99: A Novel Luminescent Tube with Linear CNT Field Emission Cathode Prepared by Electrophoresis

“…Recently, applications of carbon nanotubes (CNT) field emission cathodes for lighting have attracted much interest because of the requirements to the ecological safety and energy savings [1][2][3]. The current fabrication techniques of CNT field emission cathode are developed mainly into three categories: the one is directly grown of CNT by chemical vapor deposition (CVD), which needs high growth temperature [4]. Other is sintered CNT pattern by screen-printing with CNT buried in organic binder mixture [5].…”