Characteristics of DC magnetron sputtered ternary cobalt–nickel silicide thin films for ultra shallow junction devices

Diffusion kinetics and evolution of self-assembled nickel germanide nanorings on germanised Si (100)

“…RBS measurement using 2 MeV and 3 MeV He 2+ ion beam delivered from a tandem pelletron accelerator was carried out with a silicon surface barrier detector xed at a backscattering angle of 165 and the spectrum were analyzed using standard computer simulation soware SIMNRA 6.03. [33][34][35] RBS experimental parameters were kept identical during each set of experiment. Tapping mode AFM (Nanoscope IV, Veeco) and SEM (LIO430i) were performed to study the nanoring formation of the samples.…”