2009
DOI: 10.1002/pssc.200880409
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Characteristics of GaN‐based light emitting diode grown on circular convex patterned sapphire substrate

Abstract: We report the characteristics of GaN‐based light‐emitting diode (LED) grown on a circular convex patterned sapphire substrate (CCPSS) and conventional LEDs on a non‐patterned sapphire substrate (PSS) by metal‐organic chemical vapor deposition. A near field scanning optical microscope (NSOM) and micro Raman spectroscopy were employed to investigate the crystalline properties. In NSOM image and spectra of LED on CCPSS, an improved crystalline quality with emission fluctuation feature on the trench region was obt… Show more

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Cited by 8 publications
(2 citation statements)
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“…In this study, a patterned sapphire substrate (PSS) was employed to reduce the misfit dislocation density and to improve the LEE. [20][21][22][23][24][25] The fabrication processes and performance of the fabricated LEDs with an Al mirror and a three-pair ALD-grown TiO 2 /Al 2 O 3 DBR on the backside of the PSS will be described in detail below.…”
mentioning
confidence: 99%
“…In this study, a patterned sapphire substrate (PSS) was employed to reduce the misfit dislocation density and to improve the LEE. [20][21][22][23][24][25] The fabrication processes and performance of the fabricated LEDs with an Al mirror and a three-pair ALD-grown TiO 2 /Al 2 O 3 DBR on the backside of the PSS will be described in detail below.…”
mentioning
confidence: 99%
“…However, when the light is directed to fall within c , it can freely escape from the LED to air. Therefore, several recent studies have focused on improving LEE by changing light trajectories in devices, using different approaches, such as the application of distributed Bragg reflector (DBR) backside reflector, [4][5][6][7] integration of two-dimensional photonic crystal structures, [8][9][10] preparation of patterned sapphire substrate (PSS), [11][12][13][14][15][16] and control of surface textures. [17][18][19][20] In recent years, a surface passivation layer has been introduced to improve the optical and electrical performances of the LEDs both theoretically and experimentally.…”
mentioning
confidence: 99%