1996
DOI: 10.1063/1.118001
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Characteristics of the high density plasma production by m=0 helicon wave

Abstract: Surface wave operation mode of the slot antenna microwave plasma source SLAN Polysilicon gate etching in high density plasmas. III. Xray photoelectron spectroscopy investigation of sidewall passivation of silicon trenches using an oxide hard mask Polysilicon gate etching in high density plasmas. II. Xray photoelectron spectroscopy investigation of silicon trenches etched using a chlorinebased chemistry

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Cited by 31 publications
(32 citation statements)
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“…Very few experimental investigations were conducted to find an optimum B 0 in helicon wave discharges using molecular gases such as H 2 and N 2 . 14 In this article, we investigate the contribution of the SW on high-density plasma production by mϭ0 helicon waves 14,[16][17][18][19][20] using several gases such as H 2 , D 2 , He, N 2 , Ne, Ar, and Xe.…”
Section: Introductionmentioning
confidence: 99%
“…Very few experimental investigations were conducted to find an optimum B 0 in helicon wave discharges using molecular gases such as H 2 and N 2 . 14 In this article, we investigate the contribution of the SW on high-density plasma production by mϭ0 helicon waves 14,[16][17][18][19][20] using several gases such as H 2 , D 2 , He, N 2 , Ne, Ar, and Xe.…”
Section: Introductionmentioning
confidence: 99%
“…Differing experimental conditions could also lead to disparities in the results. For instance, the helicon waves were often generated in a small tube and then injected into a larger chamber [5,6,8,9], thus violating boundary conditions used in existing theories. In some cases, a fullwavelength antenna was used instead of a half-wavelength antenna [5,6]; a light ion was used instead of argon [9]; or the magnetic field was extremely uniform [7].…”
Section: Introductionmentioning
confidence: 99%
“…This extrapolation is highly conjectural and is based on the belief that proper gas handling will overcome the problems encountered in the present experiment. Sakawa et al have achieved densities >10 14 cm −3 in a geometry [21] similar to that proposed in figure 13, but the experiment was not pushed to the 10 15 cm −3 densities envisioned here.…”
Section: Conclusion and Projectionsmentioning
confidence: 61%
“…Equating (9) and (10), we find that n n cannot be found this way, while n e is given by n e =v/2aP i f…”
Section: Conclusion and Projectionsmentioning
confidence: 99%
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