Characteristics of tin nitride thin-film negative electrode for thin-film microbattery

Park, Kyusung; Park, Y. J.; Kim, M. K.; Son, Jong‐Tae; Kim, H. G.; Kim, S. J.

doi:10.1016/s0378-7753(01)00829-1

Cited by 30 publications

(30 citation statements)

References 11 publications

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“…Numerous methods to synthesize metal thin films are known such as atmospheric pressure chemical vapor deposition (CVD) [1,2,6,9], plasmaenhanced CVD [10], magnetron sputtering [11,12], reactive sputtering [13,14], and reactive radio frequency (RF) sputtering [3,5,15,16]. Among them, reactive RF magnetron sputtering is commonly used to obtain uniform thin films.…”

Section: Introductionmentioning

confidence: 99%

Tin nitride thin films fabricated by reactive radio frequency magnetron sputtering at various nitrogen gas ratios

Choi¹,

Kang²,

Park³

et al. 2014

Thin Solid Films

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Section: Introductionmentioning

confidence: 99%

Tin nitride thin films fabricated by reactive radio frequency magnetron sputtering at various nitrogen gas ratios

Choi¹,

Kang²,

Park³

et al. 2014

Thin Solid Films

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“…Group IV-Nitride (IV-N) semiconductors on the other hand, such as Si 3 N 4 [4] and Ge 3 N 4 [5] have been investigated mainly as dielectrics, but Sn 3 N 4 , which has been proposed as a material for energy storage [6] and solar cells [7], has not been investigated despite the fact that Sn has a low melting point of 232 1C and is cheap. To date Sn 3 N 4 films have been grown by halide chemical vapor deposition [8,9], metal organic chemical vapor deposition (MOCVD) [10], sputtering [11][12][13][14] and ammonothermal synthesis [15,16].…”

Section: Introductionmentioning

confidence: 99%

A systematic study of the nitridation of SnO2 nanowires grown by the vapor liquid solid mechanism

Zervos

Othonos

2012

Journal of Crystal Growth

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“…Xie et al [73] successfully fabricated a crystallized SnSe thin film by pulsed laser ablation of a mixed target of Sn and Se, the reversible discharge capacities of which were between 260 and 498 mAh g 1 in the range 0.012.5 V. Reversible formation and decomposition of Li 2 Se was found during the reaction of SnSe with lithium, which was completely different from the situation with SnO x and SnS x , whereby Li 2 O and Li 2 S were inactive. Park et al [74] reported the anode behaviors of Sn 4 N 3 thin films, which were deposited by reactive r. f. magnetron sputtering at various deposition temperatures. It was found that the rechargeability of the Sn 4 N 3 thin films was improved as the irreversible capacity fraction was increased.…”

Section: Other Sn-based Composite Thin-film Anodesmentioning

confidence: 99%

Progress on Sn-based thin-film anode materials for lithium-ion batteries

Liu

Zeng

et al. 2012

Chin. Sci. Bull.

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Thin-film lithium-ion batteries are the most competitive power sources for various kinds of micro-electro-mechanical systems and have been extensively researched. The present paper reviews the recent progress on Sn-based thin-film anode materials, with particular emphasis on the preparation and performances of pure Sn, Sn-based alloy, and Sn-based oxide thin films. From this survey, several conclusions can be drawn concerning the properties of Sn-based thin-film anodes. Pure Sn thin films deliver high reversible capacity but very poor cyclability due to the huge volume changes that accompany lithium insertion/extraction. The cycle performance of Sn-based intermetallic thin films can be enhanced at the expense of their capacities by alloying with inactive transition metals. In contrast to anodes in which Sn is alloyed with inactive transition metals, Sn-based nanocomposite films deliver high capacity with enhanced cycle performance through the incorporation of active elements. In comparison with pure Sn anodes, Sn-based oxide thin films show greatly enhanced cyclability due to the in situ formation of Sn nanodispersoids in an Li 2 O matrix, although there is quite a large initial irreversible capacity loss. For all of these anodes, substantial improvements have been achieved by micro-nanostructure tuning of the active materials. Based on the progress that has already been made on the relationship between the properties and microstructures of Sn-based thin-film anodes, it is believed that manipulating the multi-phase and multi-scale structures offers an important means of further improving the capacity and cyclability of Sn-based alloy thin-film anodes. Lithium-ion batteries are widely used nowadays as important power sources for portable electronic devices and electric or hybrid vehicle (EV/HEV) applications due to their high energy density, high voltage, and long lifespan. At present, large-scale and miniaturization are the two most important development directions for high-performance lithium-ion batteries. With respect to miniaturization, the major task is developing thin-film/micro-batteries that might be applied in micro-electro-mechanical systems (MEMS), smart cards, implantable medical devices, and so on. As for conventional batteries, high specific capacity of electrode materials is an essential requirement for thin-film batteries [1]. Moreover, ultra-thin form, good flexibility, and high energy density are the most important properties of thinfilm Li-ion batteries, which depend on the cathodes, anodes, electrolyte, and current collectors that comprise the thinfilm structure [2]. In early work, lithium metal films were widely studied as anodes for thin-film Li-ion batteries. However, lithium metal is very flammable and air-and water-sensitive. Moreover, minute lithium dendrites could form on the anodes when such lithium batteries were rapidly charged, and these in turn could induce short circuits, causing the battery to rapidly overheat and catch fire. This hazard limited the application of lithium-film a...

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Characteristics of tin nitride thin-film negative electrode for thin-film microbattery

Cited by 30 publications

References 11 publications

Tin nitride thin films fabricated by reactive radio frequency magnetron sputtering at various nitrogen gas ratios

Tin nitride thin films fabricated by reactive radio frequency magnetron sputtering at various nitrogen gas ratios

A systematic study of the nitridation of SnO2 nanowires grown by the vapor liquid solid mechanism

Progress on Sn-based thin-film anode materials for lithium-ion batteries

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