Characterization and application in XRF of HfO₂-coated glass monocapillary based on atomic layer deposition*

Abstract

Coating a glass monocapillary x-ray optics with high-density film is a promising way to improve transmission characteristics. For a long time, it has been a challenge to coat a high-density film in the inside of monocapillary with an extremely high length-to-diameter ratio. In this work, HfO2 film is deposited on the inner wall of a tapered glass monocapillary with length 9.9 cm, entrance diameter 596.4 μm, and exit diameter 402.3 μm by atomic layer deposition. The coated and uncoated monocapillaries are studied by the transmission process of x-rays with energy from 5 keV to 100 keV and the x-ray fluorescence (XRF) spectra of a Mo sample are detected. Improved transmission characteristics have been obtained for the HfO2-coated monocapillary. The energy upper limit of focused x-rays increases from 18.1 keV to 33.0 keV and the ‘penetration halo’ is suppressed to some extent. The XRF spectrum presents two stronger peaks at ∼ 17.4 keV and ∼ 19.6 keV which are considered as the characteristic x-rays of Mo K α and Mo K β . These results reveal that more higher energy x-rays from the W x-ray tube are totally reflected on the inner wall of the HfO2-coated glass monocapillary due to the increase of total reflection critical angle. This work is significant for more applications of monocapillary in higher energy x-ray field.

Insight into influence of thermodynamic coefficients on transient negative capacitance in Zr-doped HfO2 ferroelectric capacitors*

“…Si substrate was cleaned by standard wet clean. Then, the bottom electrode (TiN), the 10-nm-thick Zr-doped HfO 2 (HZO) thin film and top electrode (TiN and W) were deposited by atomic layer deposition [49,50] (ALD) in turn. The HZO thin films were crystallized in N 2 ambient and rapid thermal anneal (RTA) system of 550-650 • C. The composition of the HZO thin film was changed by controlling the deposition ratio of HfO 2 and ZrO 2 to realize the adjustment of ferroelectric intrinsic parameters (thermodynamic coefficients α, β and γ, etc) and form the ferroelectric capacitors with different Hf:Zr ratios.…”

Glancing incidence x-ray fluorescence spectrometry based on a single-bounce parabolic capillary

“…X-ray fluorescence (XRF) spectrometry is an established analytical tool for detecting trace amounts of material on a micrometer depth scale. [1,2] It has been applied in several research fields, such as chemical analysis, [3] mineral analysis, [4] archaeometry, [5] medicine, [6] jewelry identification [7] and environmental sciences. [8,9] In conventional XRF spectrometry, the angle of incidence of the primary x-ray beam is usually set to around 45 • to study the properties of relatively deep regions of the sample.…”