2009 German Microwave Conference 2009
DOI: 10.1109/gemic.2009.4815912
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Characterization and Modeling of Continuously Tunable MEMS Varactor

Abstract: In this work a circuit model for a continuously tunable varactor is presented which is based on a microelectromechanical system (MEMS). This behavioral model can be implemented in commercially available simulation tools and allows for complete circuit simulations in terms of small-and large-signal performance, as well as for transient and envelope responses. For the present implementation Agilent's ADS is used but the modeling methodology can be generalized for use in other tools as well. For the MEMS varactor… Show more

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Cited by 5 publications
(3 citation statements)
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“…These requirements are critical in the field of PA design. Competing technologies like micro-electromechanical-systems (MEMS) [8] are usually limited in power and tuning speed but highly linear. In contrast varactor diodes are fast [9] and available for high power applications but inherently nonlinear.…”
Section: Bst Mim Thick-film Varactor Designmentioning
confidence: 99%
“…These requirements are critical in the field of PA design. Competing technologies like micro-electromechanical-systems (MEMS) [8] are usually limited in power and tuning speed but highly linear. In contrast varactor diodes are fast [9] and available for high power applications but inherently nonlinear.…”
Section: Bst Mim Thick-film Varactor Designmentioning
confidence: 99%
“…In terms of tuning speed, size and cost, electronic tuning outperforms mechanical concepts by far. Micro‐electro‐mechanical systems are small and linear, but limited regarding tuning speed and power handling capability [3]. When using semiconductor varactor diodes as in [2], their inherent non‐linearity must be kept in mind.…”
Section: Introductionmentioning
confidence: 99%
“…MEMS devices such as switches [13][14][15] and varactors [16,17] are fabricated on a variety of materials including silicon, gallium arsenide, silicon dioxide, LTCC, and ceramic.…”
Section: Mems Devicesmentioning
confidence: 99%