Characterization and pervaporation of chlorinated hydrocarbon-water mixtures with fluoroalkyl methacrylate-grafted PDMS membrane

Mishima, Satoko; Kaneoka, H.; Nakagawa, Tsutomu

doi:10.1002/(sici)1097-4628(19990110)71:2<273::aid-app11>3.0.co;2-x

Cited by 22 publications

(22 citation statements)

References 53 publications

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“…According to these requirements, an elastomeric PDMS mold has been most commonly used for NIL-based patterning of functional resist. The PDMS has high permeability [87][88][89], so the solvent and the gas product can be removed through the PDMS mold during the NIL process. Additionally, the low surface energy [90,91] of the PDMS mold promotes uniform transferring of functional nano-patterns from the PDMS mold to the substrate without problems related to resist sticking to the mold.…”

Section: Process Types Of Direct Nil Using Functional Resistsmentioning

confidence: 99%

Recent progress in direct patterning technologies based on nano-imprint lithography

Byeon

Lee

2012

Eur. Phys. J. Appl. Phys.

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Abstract. Nano-imprint lithography (NIL) is one of the most promising patterning technologies, in which nano-and micro-patterns are fabricated on various substrates. NIL provides high throughput and low cost in fabricating nano-structures due to its simple process and allows resolution below 10 nm without issues of light diffraction with conventional lithographic techniques. Its patterning mechanism is based on mechanical deformation of a polymer resist, which is simply done by pressing with a mold. This patterning mechanism also enables inorganic and organic-inorganic hybrid materials to be directly patterned by NIL. This article covers the recent progress of NIL-based direct patterning techniques and their applications to devices. Recently, functional nano-and micro-patterns have been applied to various electronic devices for the enhancement of overall performance. Fabrication methods of these devices are difficult using conventional lithographic techniques due to complex processes, high cost and low throughput. Direct NIL technique using functional resist can simply fabricate functional nano-and micro-structures and thus can be usefully applied to various industries.

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Section: Process Types Of Direct Nil Using Functional Resistsmentioning

confidence: 99%

Recent progress in direct patterning technologies based on nano-imprint lithography

Byeon

Lee

2012

Eur. Phys. J. Appl. Phys.

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“…The pervaporation experiments were performed in a previous study [3][4][5]7 using the continuous-feed type at 25°C. The feed solution was circulated through the cell and the feed tank.…”

Section: Pervaporation Experimentsmentioning

confidence: 99%

“…31,32 We studied improving PDMS membranes by graft polymerization of fluoroalkylmethacrylates (FALMA) to enhance the affinity of PDMS to VOCs. [3][4][5]7 These grafted membranes increased the selectivity for VOCs and showed effective separation performance.…”

Section: Introductionmentioning

confidence: 99%

Characterization for graft polymerization of alkyl methacrylate onto polydimethylsiloxane membranes by electron beam and their permselectivity for volatile organic compounds

Mishima

Kaneoka

Nakagawa

2000

J. Appl. Polym. Sci.

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“…The pervaporation experiments were performed in a previous study 22,23 using the continuous-feed type method at 25°C. The feed solution was cir- 10,12 culated through the cell and the feed tank.…”

Section: Pervaporation Experimentsmentioning

confidence: 99%

The behavior of solute organic compounds and water in poly(dimethylsiloxane)

Mishima¹,

Nakagawa²

2000

J. Appl. Polym. Sci.

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The properties of an aqueous solution are interesting depending on its application. Their characteristics are mainly a result of a hydrophobic interaction. The permeation behavior, particularly for an aqueous solution with a hydrophilic solute, is affected by the hydration of water to the solute. In case of an aqueous solution of organic compounds, generally, the water molecule adjacent to the solute become less mobile than in the pure water due to hydration. The hydration may affect the diffusivity of solute molecules during permeation. In this study, we investigated the pervaporation through a poly(dimethylsiloxane (PDMS) membrane and the hydration effect on the solution-diffusion mechanism for various organic compounds. When the concentration of the solution was over the concentration calculated by the number of water molecules adjacent to a solute molecule, the hydration number, the water molecules hydrate to several solute molecules, and the motion of the water molecules was prevented. During pervaporation, the solute was concentrated in the PDMS membrane and the diffusion of water molecules was prevented.In the case that the solute is an organic compound, the interaction between water molecules

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Characterization and pervaporation of chlorinated hydrocarbon-water mixtures with fluoroalkyl methacrylate-grafted PDMS membrane

Cited by 22 publications

References 53 publications

Recent progress in direct patterning technologies based on nano-imprint lithography

Recent progress in direct patterning technologies based on nano-imprint lithography

Characterization for graft polymerization of alkyl methacrylate onto polydimethylsiloxane membranes by electron beam and their permselectivity for volatile organic compounds

The behavior of solute organic compounds and water in poly(dimethylsiloxane)

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