Characterization and strain gradient optimization of PECVD poly-SiGe layers for MEMS applications

Gromova, Maria; Mehta, Ankit Nalin; Baert, Kasper; Witvrouw, Ann

doi:10.1016/j.sna.2005.12.048

Cited by 32 publications

(16 citation statements)

References 8 publications

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“…The absolute dielectric constant in vacuum is taken to be ε v = 8.8542 × 10 −12 F m −1 . van der Waals force F v according to Liu et al [29] is assumed to take the form 15) where the Hamaker constant A 12 = 4 × 10 −20 J. The Casimir force according to Liu et al [29] is and substituting (2.11) and (2.12) into equation (2.17), we can obtain the nonlinear governing equations for the microbeam as follows:…”

Section: Basic Equationsmentioning

confidence: 99%

Nonlinear analysis of thermally and electrically actuated functionally graded material microbeam

Meguid

et al. 2014

Proc. R. Soc. A.

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In this paper, we provide a unified and selfconsistent treatment of a functionally graded material (FGM) microbeam with varying thermal conductivity subjected to non-uniform or uniform temperature field. Specifically, it is our objective to determine the effect of the microscopic size of the beam, the electrostatic gap, the temperature field and material property on the pull-in voltage of the microbeam under different boundary conditions. The nonuniform temperature field is obtained by integrating the steady-state heat conduction equation. The governing equations account for the microbeam size by introducing an internal material length-scale parameter that is based on the modified couple stress theory. Furthermore, it takes into account Casimir and van der Waals forces, and the associated electrostatic force with the first-order fringing field effects. The resulting nonlinear differential equations were converted to a coupled system of algebraic equations using the differential quadrature method. The outcome of our work shows the dramatic effect and dependence of the pull-in voltage of the FGM microbeam upon the temperature field, its gradient for a given boundary condition. Specifically, both uniform and non-uniform thermal loading can actuate the FGM microbeam even without an applied voltage. Our work also reveals that the non-uniform temperature field is more effective than the uniform temperature field in actuating a FGM cantilever-type microbeam.

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Section: Basic Equationsmentioning

confidence: 99%

Nonlinear analysis of thermally and electrically actuated functionally graded material microbeam

Meguid

et al. 2014

Proc. R. Soc. A.

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“…Especially, Witvrouw and his co-workers [10,11] developed a multilayer poly-SiGe deposition process for fabricating MEMS structural layers that fulfill all material and economical requirements. They find that Ploy-SiGe shows excellent properties in this MEMS applications.…”

Section: Introductionmentioning

confidence: 99%

Size effect on the free vibration of geometrically nonlinear functionally graded micro-beams under electrical actuation and temperature change

Jia

Feng

et al. 2015

Composite Structures

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“…With their associates, they also conducted an experimental study for the characterization and strain gradient optimization of PECVD (plasma enhanced chemical vapor deposition) poly-SiGe layers for MEMS applications [6]. Recently, Jia et al [7,8] studied the pull-in instability and free vibration of electrostatically actuated FGM (functionally graded material) micro-beams allowing for the geometric nonlinearity and intermolecular Casimir force, but without considering the temperature change.…”

Section: Introduction mentioning

confidence: 99%

Free Vibration of Geometrically Nonlinear Functionally Graded Micro-switches under Electrostatic Force and Temperature Change

Jia¹,

Feng²,

Tang³

2015

JMEA

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Abstract:The free vibration characteristics of functionally graded micro-switches under combined electrostatic, axial residual stress and temperature change is investigated, with an emphasis on the effect of geometric nonlinear deformation due to mid-plane stretching, the influence of volume fraction profile parameter and temperature change. The micro-switch considered in this study is made of either homogeneous material or non-homogeneous functionally graded material with two material phases. Taking the temperature-dependency of the effective material properties into consideration, the Voigt model is used to simulate the material properties of the FGMs (functionally graded materials). The principle of virtual work is used to derive the nonlinear governing differential equation. The eigenvalue problem which describes free vibration of the micro-beam at its statically deflected state is then solved using DQM (differential quadrature method). The natural frequencies of clamped-clamped micro-switches are obtained. The solutions are validated through direct comparisons with experimental results reported in previous studies. A parametric study is conducted to show the effects of geometric nonlinearity, material composition, temperature change and geometrical parameters for the natural frequencies.

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Characterization and strain gradient optimization of PECVD poly-SiGe layers for MEMS applications

Cited by 32 publications

References 8 publications

Nonlinear analysis of thermally and electrically actuated functionally graded material microbeam

Nonlinear analysis of thermally and electrically actuated functionally graded material microbeam

Size effect on the free vibration of geometrically nonlinear functionally graded micro-beams under electrical actuation and temperature change

Free Vibration of Geometrically Nonlinear Functionally Graded Micro-switches under Electrostatic Force and Temperature Change

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