Characterization and temperature controlling property of TiAlN coatings deposited by reactive magnetron co-sputtering

Chen, J.T.; Wang, Jizeng; Zhang, F.; Zhang, G.A.; Fan, Xiaolong; Wu, Zhiguo; Yan, Pengxun

doi:10.1016/j.jallcom.2008.04.083

Cited by 83 publications

(53 citation statements)

References 25 publications

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“…The structure is highly textured in the (220) crystallographic orientation, besides being characterized by the presence of (111) and (311) diffraction peaks. These results indicated that a solid solution between Ti and Al is formed, with aluminum atoms in the crystalline structure of cubic-TiN generating an interstitial nitride [28] [28]. The absence of (200) peak is related to the low N 2 /Ar ratio used in this work.…”

Section: A Coating Characteristicsmentioning

confidence: 69%

“…The absence of (200) peak is related to the low N 2 /Ar ratio used in this work. For higher N 2 /Ar ratios, the aluminum nitriding produces separation of h-AlN(101) and c-TiAlN(200) phases and also inhibits TiAlN (220) growth [28], [29]. Table IV shows the thickness, deposition rate, roughness (Ra), hardness (H), elastic modulus (E), resistance to plastic deformation (H 3 /E 2 ) and critical load (L C ) of TiAlN coatings.…”

Section: A Coating Characteristicsmentioning

confidence: 99%

“…Table IV shows the thickness, deposition rate, roughness (Ra), hardness (H), elastic modulus (E), resistance to plastic deformation (H 3 /E 2 ) and critical load (L C ) of TiAlN coatings. The low roughness obtained can be attributed to the achieved surface finish of substrates and deposition parameters, including pressure, bias and temperature [21], [28]. …”

Section: A Coating Characteristicsmentioning

confidence: 99%

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The Effect of Counterpart Material on the Sliding Wear of TiAlN Coatings Deposited by Reactive Cathodic Pulverization

et al. 2015

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This work aims to study the effect of the counterpart materials (100Cr6, Al2O3 and WC-Co) on the tribological properties of TiAlN thin films deposited on AISI H13 steel substrate by reactive magnetron co-sputtering. The structural characterization of the TiAlN films, performed by X-ray diffraction, showed (220) textured fcc crystalline structure. The values of hardness and elastic modulus obtained by nanoindentation were 27 GPa and 420 GPa, respectively, which resulted in films with a relatively high resistance to plastic deformation. Ball-on-disk sliding tests were performed using normal loads of 1 N and 3 N, and 0.10 m/s of tangential velocity. The wear coefficient of the films was determined by measuring the worn area using profilometry every 1000 cycles. The mechanical properties and the chemical stability of the counterpart material, debris formation and the contact stress influences the friction and the wear behavior of the studied tribosystems. Increasing the hardness of the counterpart decreases the coefficient of friction (COF) due to lower counterpart material transference and tribofilm formation, which is able to support the contact pressure. High shear stress concentration at the coating/substrate interface was reported for higher load promoting failure of the film-substrate system for all tribopairs.

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Section: A Coating Characteristicsmentioning

confidence: 69%

Section: A Coating Characteristicsmentioning

confidence: 99%

Section: A Coating Characteristicsmentioning

confidence: 99%

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The Effect of Counterpart Material on the Sliding Wear of TiAlN Coatings Deposited by Reactive Cathodic Pulverization

et al. 2015

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“…The thickness of the TiAlN coatings deposited on the tungsten carbide insert tool varied between 0.6 to 2 µm. 2 ] where d cor is the penetration depth in the plastic deformation area and is given in unit of kg/mm 2 or Giga Pascal (GPa) where 1000 kg/mm 2 = 9.807 GPa [8]. The area under the curve represented the elastic deformation energy, while the area between the curves represented the plastic deformation energy.…”

Section: Resultsmentioning

confidence: 99%

“…A stoichiometric of the TiAl target (50:50 at.%) may produce a different sputtered TiAlN coating composition due to the varying sputtering parameters [1]. The sputtered coating crystal was a columnar structure, which consists of pores between the grain boundaries due to low ion bombardment energy during coating deposition [2]. The structure transformation of the TiAlN coating crystal occured because of the varying substrate biases and the nitrogen gas pressure [3].…”

Section: Introductionmentioning

confidence: 99%

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

Budi¹,

Muhamad²,

Rahman³

2015

MST

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The effect of the sputtering parameters on the mechanical tribology properties of Titanium Aluminum Nitride coating on the tungsten cabide insert tool in the dry turning of tool steel has been investigated. The coating was deposited using a Direct Current magnetron sputtering system with various substrate biases (-79 to -221 V) and nitrogen flow rates (30 to 72 sccm). The dry turning test was carried out on a Computer Numeric Code machine using an optimum cutting parameter setting. The results show that the lowest flank wear (~0.4 mm) was achieved using a Titanium Aluminum Nitride-coated tool that was deposited at a high substrate bias (-200 V) and a high nitrogen flow rate (70 sccm). The lowest flank wear was attributed to high coating hardness. AbstrakSifat Mekanik dan Tribologi Lapisan Titanium Aluminium Nitrida pada Perkakas Tungsten Karbida dalam Pemotongan Kering Baja. Telah dilakukan penelitian mengenai pengaruh parameter sputering terhadap sifat mekanik dan tribologi lapisan Titanium Aluminum Nitrida pada perkakas potong tungsten karbida dalam proses pemotongan turning kering baja perkakas. Deposisi lapisan tipis dilakukan menggunakan sistem sputtering magnetron dengan variasi tegangan substrate (-79 s/d -221 Volt) dan laju alir gas nitrogen (30 s/d 72 sccm). Pemotongan turning kering dilakukan menggunakan mesin bubut otomatis CNC dengan parameter pemotongan optimum. Hasil percobaan menunjukan bahwa aus sisi terendah (~0.4 mm) perkakas ditunjukan oleh lapisan Titanium Aluminum Nitrida yang dideposisikan pada tegangan substrat (-200 V) dan laju alir gas nitrogen (70 sccm) tinggi. Rendahnya aus sisi perkakas diakibatkan oleh tingginya nilai kekerasan lapisan.

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Laser Surface Cleaning: Removal of Hard Thin Ceramic Coatings

et al. 2018

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Characterization and temperature controlling property of TiAlN coatings deposited by reactive magnetron co-sputtering

Cited by 83 publications

References 25 publications

The Effect of Counterpart Material on the Sliding Wear of TiAlN Coatings Deposited by Reactive Cathodic Pulverization

The Effect of Counterpart Material on the Sliding Wear of TiAlN Coatings Deposited by Reactive Cathodic Pulverization

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

Laser Surface Cleaning: Removal of Hard Thin Ceramic Coatings

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