2010
DOI: 10.1007/s00216-010-3675-y
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Characterization of a capacitance-coupled contactless conductivity detection system with sidewall electrodes on a low-voltage-driven electrophoresis microchip

Abstract: A new type of capacitance-coupled contactless conductivity detection (C(4)D) system with sidewall electrodes was proposed for integration on a silicon-on-isolator-poly(dimethylsiloxane) (SOI-PDMS) hybrid low-voltage-driven electrophoresis microchip. By a microelectromechanical system process, the sidewall electrodes were fabricated precisely at either side of the separation channel. The area of the capacitor electrodes was the maximum value to improve the detection sensitivity with an enhanced capacitance effe… Show more

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Cited by 16 publications
(8 citation statements)
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“…In a different approach, Pt sensing electrodes were prepared on a PMMA plate, which was subsequently bonded with a microchannel PMMA plate with a 50 μm thin PMMA film to achieve a minimum distance between the electrodes and the microchannel . A sidewall construction of detection electrodes, which were positioned at the side of the separation channel and were insulated from the channel with only a 1 μm thick silicon layer, was presented by Xu et al . The gap between the electrodes (80 μm) was given by the separation channel width and due to the short interelectrode distance, Faraday shielding, which was necessary to minimize stray capacitance, was incorporated into the silicon insulating layer.…”
Section: Electrophoresis Methods Implemented On Microfluidic Devicesmentioning
confidence: 99%
“…In a different approach, Pt sensing electrodes were prepared on a PMMA plate, which was subsequently bonded with a microchannel PMMA plate with a 50 μm thin PMMA film to achieve a minimum distance between the electrodes and the microchannel . A sidewall construction of detection electrodes, which were positioned at the side of the separation channel and were insulated from the channel with only a 1 μm thick silicon layer, was presented by Xu et al . The gap between the electrodes (80 μm) was given by the separation channel width and due to the short interelectrode distance, Faraday shielding, which was necessary to minimize stray capacitance, was incorporated into the silicon insulating layer.…”
Section: Electrophoresis Methods Implemented On Microfluidic Devicesmentioning
confidence: 99%
“…In the last years, special attention has been dedicated to the developing of chip‐based microsystems for chemical and biochemical analysis . Among other analytical techniques, electrophoresis is one of the most applied separation method to microfluidic platforms .…”
Section: Introductionmentioning
confidence: 99%
“…The width of each microelectrode is 20 μm. The adjacent microelectrodes on each sidewall are separated by a vertical microstructure made of SiO 2 ‐Polysilicon‐SiO 2 /silicon []. The width and depth of each microstructure are, 60 μm and 35 μm, respectively.…”
Section: Methodsmentioning
confidence: 99%