Characterization of a Dipole Surface Drive Actuator With Large Travel and Force

Agarwal, Mangilal; Dutton, D.T.; Theil, Jeremy A.; Bai, Qing; Par, E.; Hoen, S.

doi:10.1109/jmems.2006.883886

Cited by 8 publications

(14 citation statements)

References 23 publications

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“…A high out-of-plane to in-plane stiffness ratio is required, because the available force is limited by the vertical snap-in voltage (48 V in this case). A displacement of 17 µm was reached with 30 V bias; larger displacements of up to 70 µm were reached, but in that case significant out-of-plane motion was observed 208 . The out-of-plane force can be cancelled by another dipole surface drive placed 'upside-down' on top of the translator.…”

Section: Electrostatic Stepper Motorsmentioning

confidence: 92%

“…Figure 16 shows the electrostatic dipole surface drive of Agilent 208,209 . The translator features a periodic pattern of electrodes and is suspended above the stator, which also has a periodic pattern of electrodes but with a different pitch.…”

Section: Electrostatic Stepper Motorsmentioning

confidence: 99%

“…Smaller displacements are made by adjusting the voltage on one of the electrodes. In the design reported by Agarwal et al 208 , the gap between the stator and translator electrodes is 2.4 µm. A high out-of-plane to in-plane stiffness ratio is required, because the available force is limited by the vertical snap-in voltage (48 V in this case).…”

Section: Electrostatic Stepper Motorsmentioning

confidence: 99%

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Probe-based data storage

Koelmans,

Engelen,

Abelmann

2015

Preprint

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Probe-based data storage attracted many researchers from academia and industry, resulting in unprecedented high data-density demonstrations. This topical review gives a comprehensive overview of the main contributions that led to the major accomplishments in probe-based data storage. The most investigated technologies are reviewed: topographic, phase-change, magnetic, ferroelectric and atomic and molecular storage. Also, the positioning of probes and recording media, the cantilever arrays and parallel readout of the arrays of cantilevers are discussed. This overview serves two purposes. First, it provides an overview for new researchers entering the field of probe storage, as probe storage seems to be the only way to achieve data storage at atomic densities. Secondly, there is an enormous wealth of invaluable findings that can also be applied to many other fields of nanoscale research such as probe-based nanolithography, 3D nanopatterning, solid-state memory technologies and ultrafast probe microscopy. B. Current status of probe storageThe maturity of the various types of probe storage differs significantly. Four popular types, namely phase change, magnetic, thermomechanical and ferroelectric storage are listed in table I.Probe-based data storage has attracted much scientific and commercial interest [18][19][20] . After more than two decades of research on probe storage, an overview of what has been accomplished so far, together with an outlook of the a)

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Section: Electrostatic Stepper Motorsmentioning

confidence: 92%

Section: Electrostatic Stepper Motorsmentioning

confidence: 99%

Section: Electrostatic Stepper Motorsmentioning

confidence: 99%

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Probe-based data storage

Koelmans,

Engelen,

Abelmann

2015

Preprint

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“…Micron-scale structures are often used as capacitive sensors. Interlocking comb-shaped plates [4] are complicated structures that provide good accuracy over a very small range, while a simpler approach is to slide flat plates in the plane of the plates [5,6], noting that the capacitance between two plates is proportional to the area of overlap. The small size of these sensors enables them to measure very small displacements.…”

Section: Introductionmentioning

confidence: 99%

Low-cost capacitive sensing for precision alignment of mirrors

Bowman¹,

Buscher²

2010

Meas. Sci. Technol.

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Piezoelectric actuators are often used to align mirrors in high-precision optical systems; however they are highly hysteretic and are therefore not repeatable. Closed-loop control is a reliable way to correct for this, but requires an accurate position sensor for feedback. We present a capacitive sensor that is capable of measuring the tilt of a mirror with a noise density of 10 milliarcsec Hz−1/2 and repeatability of better than ±17 milliarcsec (corresponding to a distance of ±4 nm) over a range of more than 6 arcmin. This enables the correction of hysteresis with much better performance at low frequencies than feedforward algorithms or charge controllers. Low cost (a hundredth of the cost of similar systems) and ease of construction and integration with commercially available mirror mounts are its primary advantages. The effect of temperature on the mirror mount was significant, with a change of several arcsec per degree Celsius. However, it was possible to obtain stable performance over periods of several hours in a lab without sophisticated temperature control.

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“…This assumption was proved to be wrong in the microscopic region by the revolutionary advance in the field of MEMS (microelectromechanical systems) [1,2]. Since then, various types of electrostatic motors were developed and studied, including variable capacitance motors [3][4][5][6], induction motors [7], electret motors [8] and corona motors [9]. These electrostatic motors provide means of actuation for small-sized integrated systems such as portable electronic devices.…”

Section: Introductionmentioning

confidence: 99%