Characterization of a hybrid PVD/PACVD system for the deposition of TiC/CaO nanocomposite films by OES and probe measurements

Kulisch, W.; Colpo, Pascal; Rossi, François; Shtansky, Dmitry V.; Левашов, Е. А.

doi:10.1016/j.surfcoat.2004.07.006

Cited by 17 publications

(5 citation statements)

References 15 publications

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“…For MuBiNaFs deposition using SHScomposite targets, different methods were employed. The films were obtained by magnetron sputtering [374][375][376], ion implantation-assisted magnetron sputtering (IIAMS) [377][378][379], and а hybrid process involving sputter deposition and either inductively coupled plasma (ICP) [380][381][382] or an RF system for additional ionisation [383]. IIAMS was used to enhance film adhesion to the metal substrate via high-energy ion bombardment several minutes before and after the beginning of deposition.…”

Section: Shs In Surface Engineeringmentioning

confidence: 99%

Self-propagating high-temperature synthesis of advanced materials and coatings

Левашов

Mukas'yan

Rogachev

et al. 2016

International Materials Reviews

319

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Self-propagating high-temperature synthesis (SHS) or combustion synthesis (CS) is a rapidly developing research area. SHS materials are being used in various fields, including mechanical and chemical engineering, medical and bioscience, aerospace and nuclear industries. The goal of the present paper is to provide a comprehensive state-of-the-art review and to analyse a critical mass of knowledge in the field of SHS materials and coatings. We also briefly discuss the history and scientific foundations of SHS along with an overview of the technological aspects for synthesis of different materials, including powders, ceramics, metal-ceramics, intermetallides, and composite materials. Application of CS in the field of surface engineering is also discussed focusing on two main routes for applying SHS to coating deposition: (i) single-step formation of the desired coatings and (ii) use of SHSderived powders, targets or electrodes in the coating deposition processes.

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Section: Shs In Surface Engineeringmentioning

confidence: 99%

Self-propagating high-temperature synthesis of advanced materials and coatings

Левашов

Mukas'yan

Rogachev

et al. 2016

International Materials Reviews

319

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“…1) consists of two metal chambers of different sizes: a small-radius chamber where the driver is located (RF power deposition in the region z = (−2.5 ÷ −17.5) cm) and a bigradius chamber with plasma expanding from the driver. The design of the source-with metal walls of the entire source-is that of the inductively driven (by external coils) plasma sources, with a Faraday shield inside the driver region, which are used both in plasma processing technologies [3] and as negative ion sources [4]. The discharge is in an argon gas at pressure p = 50 mTorr.…”

Section: Particle and Energy Fluxes In A Two-chamber Plasma Source Stmentioning

confidence: 99%

Particle and Energy Fluxes in a Two-Chamber Plasma Source

Kolev

Shivarova

Tarnev

et al. 2008

IEEE Trans. Plasma Sci.

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A regime of discharge maintenance with a net dc current flowing through the plasma is established in the gaspressure range that is usually governed by ambipolar diffusion. The conclusion is based on results from a 2-D fluid-plasma model developed for describing discharge maintenance in a two-chamber plasma source with metal walls. Index Terms-Charged particle fluxes, electron energy flux, high-frequency discharges, remote plasma sources, tandem plasma sources.T HE USE of gas discharges in plasma processing technologies and as particle sources is the motivation for the increasing interest in the modeling of plasma sources with complicated geometry. The two-chamber plasma source is such a complex source known as a remote-plasma source [1] in the technological applications of discharges operating in different gases and as a tandem plasma source [2] of negative hydrogen ions developed regarding the neutral beam injectors of big fusion machines like ITER. The construction of a source which combines a driver with an expanding plasma volume should drive the importance of the charged-particle and electronenergy fluxes stressed on here.The results in Fig. 1 are for the magnitude and the directions of the charged-particle and electron-energy fluxes obtained from a 2-D fluid-plasma model within a drift-diffusion approximation including thermal diffusion. The discharge vessel ( Fig. 1) consists of two metal chambers of different sizes: a small-radius chamber where the driver is located (RF power deposition in the region z = (−2.5 ÷ −17.5) cm) and a bigradius chamber with plasma expanding from the driver. The design of the source-with metal walls of the entire source-is that of the inductively driven (by external coils) plasma sources, with a Faraday shield inside the driver region, which are used both in plasma processing technologies [3] and as negative ion sources [4]. The discharge is in an argon gas at pressure p = 50 mTorr. The model is based on the continuity equations for electrons, ions, and excited atoms, the electron energy balance equation, and the Poisson equation [5]. The charged particle Manuscript production is via direct and step ionization. The electron energy balance involves both the conductive and convective fluxes, electron energy losses for the maintenance of the dc electric field in the discharge, and losses in collisions. The boundary conditions are for symmetry on the axis, particle and energy fluxes on the walls determined by thermal and drift motion, and zero dc potential on the metal walls.Stressing on plasma maintenance in the second chamber, the discussions on Fig. 1 are concentrated on the region extended in the axial direction from z = −10 cm, where the center of the driver is located, toward z = 47 cm (the back wall of the second chamber). The charged particle fluxes in Fig. 1(a) and (b) show plasma expansion from the driver. Fig. 1(c) shows the difference Γ = Γ e − Γ i of the electron and ion fluxes. An axial electron flux [ Fig. 1(a)] that is larger than the axial ion flux [ Fig. 1(b)] dete...

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“…Hybrid PVD-PECVD process is being used for synthesis of metal hydrogenated carbon nanocomposite (MeC/C(:H)) [6,[8][9][10][11][12][13] layers or DLC layers doped with metal (DLC:Me) [14][15][16][17]. For example nc-WC/a-C:H [18][19][20][21] or nc-TiC/a-C:H [9,[22][23][24] are reported to have good mechanical and tribological properties combining high hardness, good toughness with low friction coefficient and wear which makes these materials industrially attractive for different applications.…”

Section: Introductionmentioning

confidence: 99%

Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

Schmidtová

Souček

Kudrle

et al. 2013

Surface and Coatings Technology

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a b s t r a c t a r t i c l e i n f oHybrid PVD-PECVD process of titanium sputtering in argon and acetylene atmosphere combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon (PECVD). This process can be used for preparation of metal carbon nanocomposites (MeC/C(:H)) or DLC layers doped with metal (DLC:Me). The aim of this paper is to describe and understand elementary processes influencing the hybrid PVD-PECVD process. A non-monotonous dependence of cathode voltage and current, total pressure and spectral line intensities on acetylene supply flow is reported. Explanation of nonmonotonous evolutions through the analysis of the target state correlating the process characteristics with properties of coatings prepared by this process is proposed.

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Characterization of a hybrid PVD/PACVD system for the deposition of TiC/CaO nanocomposite films by OES and probe measurements

Cited by 17 publications

References 15 publications

Self-propagating high-temperature synthesis of advanced materials and coatings

Self-propagating high-temperature synthesis of advanced materials and coatings

Particle and Energy Fluxes in a Two-Chamber Plasma Source

Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply

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