Characterization of a MEMS tribogauge

Vijayasai, Ashwin; Sivakumar, G.; Ramachandran, Gautham; Anderson, Charlie; Gale, Richard; Dallas, Tim

doi:10.1016/j.surfcoat.2012.07.089

Cited by 3 publications

(2 citation statements)

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“…Wear is another potential factor contributing to sticking. Our test system includes a fluoropolymer coating [16], and our data suggest that this coating wears during operation, increasing friction [17]. Stiction likely results from friction between the torsion frame and the ring gear.…”

Section: Stiction Effectsmentioning

confidence: 85%

“…Our θ uncertainty of 33 μrad gives a mean uncertainty of torque measurements of 1.1 μN•μ m. Increases in the largest values of T s and the emergence of sticking corresponding to T s ≈ 45 μN•μm indicate changing surface properties. Application of our method to measure MEMS designed for tribology tests [17] can provide further insight into the relevant effects that produce these complex dynamics.…”

Section: Stiction Torquementioning

confidence: 99%

See 1 more Smart Citation

Particle Tracking of Microelectromechanical System Performance and Reliability

Copeland

McGray

Geist

et al. 2018

J. Microelectromech. Syst.

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Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability will help to understand and improve MEMS motion.

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Section: Stiction Effectsmentioning

confidence: 85%

Section: Stiction Torquementioning

confidence: 99%