Characterization of a Sub-Mm Wave Frequency Selective Surface on a Periodically Perforated Silicon Substrate

Abstract

Abstract-We carried out measurements of optical transmission through a Frequency Selective Surface (FSS) on a silicon substrate perforated periodically with square cavities of 1 mm 2 . The substrate is covered on one side with a thin film (1 µm thick) of silicon-nitride, thus forming a membrane for each cavity. The measurements were taken using a Martin-Puplett Interferometer over a spectral range from 100 to 650 GHz, providing a maximum transmission value of around 40% at 480 GHz. Analytical and computed results are also presented for comparison purposes.

Design and Simulation of an Antenna-Coupled Microbolometer at 30 THz

“…Here, the proposed substrate has 50.8 mm diameter with 196 cavities of 1 × 1 mm 2 each one. This kind of membranes can be easily fabricated using standard microelectronic techniques and can also be characterized for use as frequency selective surfaces in astronomical detectors [26].…”