This paper reports on deposition of acrylic acid films polymerized by an efficient and cost‐effective technique of dielectric barrier corona discharge at atmospheric pressure. The liquid acrylic acid was vaporized and carried by argon gas into plasma to deposit polyacrylic acid films on polydimethylsiloxane substrate. A nonthermal corona discharge was generated in a pyrex flask using a steel tube‐to‐plate asymmetric electrode configuration. The plasma was excited using an in‐house developed power supply operating with continuous wave signals of 10‐kHz frequency. The emission spectra of plasma species were recorded to know their contribution during deposition process. The deposited surfaces were characterized using contact angle measurements, atomic force microscopy, Fourier transform infrared spectroscopy, X‐ray photoelectron spectroscopy and film thickness measurements. A maximum film growth rate of 363 nm/min was achieved under optimal condition of discharge. The results suggest that this plasma technique is capable of depositing organic coatings with a high concentration of carboxylic functional groups that could be potentially used for biomedical and microfluidic applications.