1997
DOI: 10.1116/1.580533
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Characterization of carbon and carbon nitride thin films using time-of-flight secondary-ion-mass spectrometry

Abstract: A methodology for quantitative measurement of nitrogen and hydrogen atomic composition of thin carbon nitride film using time-of-flight secondary-ion-mass spectrometry is demonstrated. The nitrogen and hydrogen compositions of the film are determined by the selected ion fragment intensity ratios ICN−/IC2− and IC2H−/IC2− measured in the negative-ion-mass spectrum of the film, respectively. Absolute values for hydrogen and nitrogen atomic compositions are extracted by calibration with nuclear reaction analysis a… Show more

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Cited by 10 publications
(6 citation statements)
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“…Furthermore, larger C x N y fragments with high nitrogen content are also observed. These results confirm the formation of an extended carbon–nitrogen network consisting predominantly of carbon–nitrogen and carbon–carbon bonds and are similar to previously reported results for carbon nitride thin films . In addition, the negative spectrum shows a fragmentation pattern similar to that of the TOF-SIMS spectrum of melamine, but with lower hydrogen content (Figure S7).…”
Section: Resultssupporting
confidence: 91%
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“…Furthermore, larger C x N y fragments with high nitrogen content are also observed. These results confirm the formation of an extended carbon–nitrogen network consisting predominantly of carbon–nitrogen and carbon–carbon bonds and are similar to previously reported results for carbon nitride thin films . In addition, the negative spectrum shows a fragmentation pattern similar to that of the TOF-SIMS spectrum of melamine, but with lower hydrogen content (Figure S7).…”
Section: Resultssupporting
confidence: 91%
“…However, graphitic surfaces do exhibit characteristic fragmentation patterns in the negative ion spectrum that consist of a series of prominent C x H y peaks with low hydrogen content. 112 The negative ion spectrum of HOPG (as shown in Figure S6 ), and hydrogenated ions with low H content (such as CH − and C 2 H − ). Furthermore, larger C x N y fragments with high nitrogen content are also observed.…”
Section: Chemistry Of Materialsmentioning
confidence: 70%
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“…We examine monodisperse difunctional derivatives for Formblin Z (i.e., Zdol and ZdolTX [3], [5]). The type of PFPE Zdol has a molecular architecture: --and is a random copolymer.…”
Section: A Materialsmentioning
confidence: 99%