SU-8, an epoxy based negative photoresist has been demonstrated as a potential precursor to fabricate thin films and three-dimensional micropatterned arrays in glassy carbon. However, the use of silicon wafer as a substrate cum collector limits their use in real battery devices. In accordance with the commercial lithium ion battery architecture and also owing to enhanced conductivity, we have successfully demonstrated the use of stainless steel (SS) wafer as a current collector to prepare binder free SU-8 derived carbon thin films. Standard carbon microelectromechanical systems (C-MEMS) process parameters were tuned to obtain a uniform, crackfree carbon thin film on SS wafer upon pyrolysis. Further, we varied the final pyrolysis temperature to examine its effect on the microstructure and composition as characterized with X-ray diffraction, Small angle X-ray scattering, Raman spectroscopy and CHNS-O elemental analyzer respectively. The microstructural changes in the carbon films at different pyrolysis temperature were then correlated with their electrochemical performance as investigated using galvanostat charge/discharge experiments, impedance spectroscopy and cyclic voltammetry. Selection of an appropriate current collector and optimizing the pyrolysis temperature yielded excellent cyclic stability and coulombic efficiency with 400 mAh g −1 reversible capacity after 100 cycles, nearly double to as reported in the literature. Carbon is one of the most commonly used anode material used in commercial rechargeable lithium (Li) ion batteries. Based on microstructure and their behavior on heat-treatment, carbonaceous materials can be classified as graphite (highly crystalline), graphitizable soft carbons and non-graphitizable hard carbons.1 Among the various carbonaceous materials, graphite materials of different grade have been studied extensively with their reported Li-ion intercalation capacities in the range of 215-370 mAh g −1 which is closer to theoretical capacity of graphite (372 mAh g −1 ). [2][3][4][5] In literature, hard carbons have been prepared by pyrolyzing different precursor materials like cotton wool, rice husk, tea leaves, isotropic pitches, epoxy novolac resins, and various other polymers.6-11 These hard carbons show much higher reversible capacity (400-700 mAh g −1 ) than that of graphite (372 mAh g −1 ). However, large irreversible capacity, average cyclic stability and hysteresis during charging and discharging for hard carbons limit their use in commercial lithium-ion batteries to secondary choice after graphitic carbons.12 Adsorption of lithium ions on the surface of the nanopores formed by random arrangement of small graphene sheets with minimal lamellar stacking like "house of cards" (Figure S1), doping of lithium at the edges of small crystallites and binding of one lithium atom with one hydrogen atom on average is known to be accountable for this higher capacity. 9,13-15 Along with these reasons, hydroxyl, carboxyl functional groups and moisture content which is very reactive to Li metal ...