Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering

Sánchez, N. A. de; Rincon, Christopher; Zambrano, G.; Galindo, H.; Prieto, P.

doi:10.1016/s0040-6090(00)01090-7

Cited by 69 publications

(23 citation statements)

References 9 publications

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“…DLC film comprises a mixture of sp 2 and sp 3 carbon bonds and is deposited by using high energy carbon species. DLC films are produced by a number of techniques like ion beam deposition, 7 radio frequency plasma enhanced chemical vapor deposition (r.f.-PECVD), 8 filtered cathodic vacuum arc (FCVA), 9 ion plating, 10 plasma immersion ion implantation and deposition (PIIID), 11 magnetron sputtering, 12 ion beam sputtering, 13 pulsed laser deposition, 14 and mass selected ion beam deposition. 15 The hydrogen content in DLC films varies up to 40%.…”

Section: Introductionmentioning

confidence: 99%

Biomedical applications of diamond‐like carbon coatings: A review

2007

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Owing to its superior tribological and mechanical properties with corrosion resistance, biocompatibility, and hemocompatibility, diamond-like carbon (DLC) has emerged as a promising material for biomedical applications. DLC films with various atomic bond structures and compositions are finding places in orthopedic, cardiovascular, and dental applications. Cells grew on to DLC coating without any cytotoxity and inflammation. DLC coatings in orthopedic applications reduced wear, corrosion, and debris formation. DLC coating also reduced thrombogenicity by minimizing the platelet adhesion and activation. However, some contradictory results (Airoldi et al., Am J Cardiol 2004;93:474-477, Taeger et al., Mat-wiss u Werkstofftech 2003;34:1094-1100) were also reported that no significant improvement was observed in the performance of DLC-coated stainless stent or DLC-coated femoral head. This controversy should be discussed based on the detailed information of the coating such as atomic bond structure, composition, and/or electronic structure. In addition, instability of the DLC coating caused by its high level of residual stress and poor adhesion in aqueous environment should be carefully considered. Further in vitro and in vivo studies are thus required to confirm its use for medical devices. '

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Section: Introductionmentioning

confidence: 99%

Biomedical applications of diamond‐like carbon coatings: A review

2007

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“…The peak height of CN bonding was found to be enhanced as nitrogen content increases. The absorption band at 2800±3000 cm À1 is identi®ed with C-H stretching vibration, which is attributed to diamond-like carbon ®lm [9,10]. As nitrogen content increased this peak was found to be de enhanced showing that the bonding was more likely to graphitic than diamond-like structure.…”

Section: Ft-ir Spectroscopymentioning

confidence: 99%

Investigation on anti-reflection property of nitrogen doped diamond-like carbon (DLC) films produced by RF magnetron sputtering

Vinod

Kakiuchi

Terai

et al. 2002

Molecular Crystals and Liquid Crystals

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Nitrogen doped Diamond-like carbon thin ®lms were deposited on n-Si and SiO 2 substrates by rf magnetron sputtering using pure graphite (99.999%) as the target material and mixtures of Ar, N 2 and H 2 for plasma generation. The dependence of structural and optical properties on nitrogen content was investigated using XPS, Raman spectroscopy, FT-IR spectroscopy, and Ellipsometry studies. It was found that as the nitrogen content was increased in the plasma, sp 2 bonding favored. Also it was observed that oxygen contamination increased with nitrogen content. Typical C-H stretching modes connected with diamond-like carbon could be seen in FT-IR spectra. The D and G bands were well de®ned and it was observed that as nitrogen content increased G band was enhanced. Ellipsometry studies revealed that the optical constants like refractive index (n) and extinction co-ef®cient (k) increased with increase in nitrogen content as well as substrate temperature.

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“…Hard amorphous carbon, so-called diamond-like carbon, have attracted attention as coating materials alternative to diamond 6,7,8,9) . In particular, nonhydrogenated amorphous carbon (a-C) films deposited by filtered cathodic vacuum arc (FCVA) 8,9) and sputtering 6,7) possess higher hardness than that of hydrogenated amorphous carbon (a-C:H) films prepared by CVD. Hard amorphous carbon films are deposited at low substrate temperatures, and a-C films can be deposited at lower substrate temperatures than a-C:H films prepared by CVD.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Ultrananocrystalline Diamond/Nonhydrogenated Amorphous Carbon Composite Films for Hard Coating by Coaxial Arc Plasma Deposition

Naragino¹,

Egiza

Tominaga

et al. 2016

Evergreen

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Ultrananocrystalline diamond (UNCD)/nonhydrogenated amorphous carbon (a-C) composite (UNCD/a-C) films were deposited on cemented carbide (WC-Co) substrates by coaxial arc plasma deposition (CAPD). To suppress the graphitization induced by Co in the WC-Co, the film deposition was carried out on unheated substrates. The hardness and Young's modulus were 51.3 GPa and 520.2 GPa, respectively. These values are comparable or rather larger than those of UNCD/a-C films deposited on other substrates such as Si, which implies that the graphitization of UNCD/a-C hardly occurs. Surprisingly, UNCD/a-C films could be deposited at the maximum film thickness of approximately 3 µm in spite of the room temperature growth. The internal compress-stress of the film is approximately 4.5 GPa, which is evidently smaller than that of comparably hard a-C films. The existence of a large number of grain boundaries in the films, which is structural specific to UNCD/a-C, might play an important role in the release of an internal stress in the film. It was experimentally demonstrated that UNCD/a-C films prepared by CAPD are potential hard coating materials for WC-Co.

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Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering

Cited by 69 publications

References 9 publications

Biomedical applications of diamond‐like carbon coatings: A review

Biomedical applications of diamond‐like carbon coatings: A review

Investigation on anti-reflection property of nitrogen doped diamond-like carbon (DLC) films produced by RF magnetron sputtering

Fabrication of Ultrananocrystalline Diamond/Nonhydrogenated Amorphous Carbon Composite Films for Hard Coating by Coaxial Arc Plasma Deposition

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