Characterization of dielectric columnar thin films by variable angle Mueller matrix and spectroscopic ellipsometry

Absolute characterization of photoluminesence from pulsed‐laser deposited, sol‐gel, sputtered and evaporated ZnO thin films

“…A geometric model for film density deposited at glancing angles [17] predicts film densities of ~5% for a deposition angle of 88 degrees and ~20% for a deposition angle of 84 degrees. Experimental measurements for MgF 2 and SiO 2 film densities are slightly higher, between 20% and 30% for a deposition angle of 85 degrees [18].…”

Optical properties and microstructure of Ta_2O_5 biaxial film

“…The surface plasmon resonance (SPR) method [25] can also be used to determine the optical constant, but is limited by the refractive index of the anisotropic film and the deposition of the metal film. The ellipsometry technique [18,[26][27][28][29] requires measurements of complex optical parameters corresponding to the intensity and the phase of reflected light from the sample. Recently, an enhanced polarization conversion phenomenon was observed and used to get the anisotropic optical constants [14].…”

Optical anisotropy of porous polymer film with inverse slanted nanocolumnar structure revealed via generalized spectroscopic ellipsometry

“…[7][8][9][10][11] Recently, generalized spectroscopic ellipsometry (GSE) has been demonstrated to be an excellent method to investigate the form-induced optical anisotropy of porous slanted columnar thin films (SCTFs) prepared via glancing angle deposition (GLAD). [12][13][14][15][16][17] For instance, GSE has been used to determine the orthorhombic or monoclinic optical properties for SCTFs, including the internal angles between major axes and principal biaxial optical constants. 12,14,18,19 Since GSE is an indirect characterization method, physical models are required to analyze the Mueller matrix data measured on SCTFs.…”

“…[12][13][14][15][16][17] For instance, GSE has been used to determine the orthorhombic or monoclinic optical properties for SCTFs, including the internal angles between major axes and principal biaxial optical constants. 12,14,18,19 Since GSE is an indirect characterization method, physical models are required to analyze the Mueller matrix data measured on SCTFs. Previously, the anisotropic Bruggeman effective medium approximation (AB-EMA) has been employed to model the GSE data of porous SCTFs to obtain the film thickness, columnar slanting angle, and classes and structures of optical anisotropy.…”

“…Previously, the anisotropic Bruggeman effective medium approximation (AB-EMA) has been employed to model the GSE data of porous SCTFs to obtain the film thickness, columnar slanting angle, and classes and structures of optical anisotropy. 12,[19][20][21] The AB-EMA is particularly useful for determining the constituent volume fractions of porous SCTFs. 22,23 Therefore, GSE analysis with the AB-EMA provides access to evaluate both structural and optical properties of porous polymer films with inverse columnar structure.…”