2005
DOI: 10.1016/j.mee.2005.07.059
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Characterization of electroplated copper self-annealing with investigations focused on incorporated impurities

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Cited by 55 publications
(37 citation statements)
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“…Although organic additives give uniform dense coatings, they remain as impurities in the deposited foils, reduce the deposit ductility and electrical conductivity, and cause grain growth with time, resulting in the deterioration of the mechanical properties. 27 The use of the PRED technique in additive-free electrolytes reduces impurities in the deposit and improves the properties due to lower residual stress, minimized adsorption of hydrogen species, and lower surface roughness. 28 Grain growth at room temperature is significantly reduced for copper films produced by PRED due to the reduced driving force for self-annealing compared to the films prepared by PED.…”
Section: Pulse Parameters Current Densitymentioning
confidence: 99%
“…Although organic additives give uniform dense coatings, they remain as impurities in the deposited foils, reduce the deposit ductility and electrical conductivity, and cause grain growth with time, resulting in the deterioration of the mechanical properties. 27 The use of the PRED technique in additive-free electrolytes reduces impurities in the deposit and improves the properties due to lower residual stress, minimized adsorption of hydrogen species, and lower surface roughness. 28 Grain growth at room temperature is significantly reduced for copper films produced by PRED due to the reduced driving force for self-annealing compared to the films prepared by PED.…”
Section: Pulse Parameters Current Densitymentioning
confidence: 99%
“…Recently, Burek et al developed a FIBless method to produce single-crystalline Cu nanopillars by electroplating Cu into an array of electron beam patterned holes in a Poly(methyl methacrylate) matrix [33]. Thin films of electroplated copper have been reported to contain trace amounts (.005% by weight) of carbon from the plating process [34]. Since these contaminations are very small, if at all present, we believe that their effect on the attained nanopillar strengths is likely negligible.…”
mentioning
confidence: 99%
“…Prior to electrodeposition, a silver strike plated layer was deposited on the Cu plate to ensure adhesion between the Cu plate and the electrodeposited silver lm. The solution used for silver strike plating contained 5.5 g/L KAg(CN) 2 and 90 g/L KCN, and the solution temperature and current density were 18 C and 2 A/dm 2 , respectively. A stainless-steel plate was used for the anode.…”
Section: Methodsmentioning
confidence: 99%
“…A stainless-steel plate was used for the anode. A cyanide-based plating solution containing 148 g/L KAg(CN) 2 , 140 g/L KCN and 11 mg/L KSeCN was used for electrodeposition, and the solution temperature and current density were 18 C and 5 A/dm 2 , respectively. A pure silver plate was used for the anode.…”
Section: Methodsmentioning
confidence: 99%
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