Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process

Comtois, John H.; Michalicek, M. Adrian; Barron, C.C.

doi:10.1109/sensor.1997.635213

Cited by 34 publications

(19 citation statements)

References 2 publications

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“…It consists of a single-mode optical fiber coated with ferromagnetic coating and (Lee et al 1997) 100 V 50 kHz switching Electro-thermal (Comtois et al 1997) 8.3 V 7 m displacement at 1.57 kHz Piezoelectric (Boppart et al 1997) 100 V 1 mm at 100 Hz Magnetic (Okano and Hirabayashi 2002) 2 V 8 at 800 Hz actuated with an external electromagnet. The optical fiber can be actuated along one or two axis to couple or decouple the laser propagation.…”

Section: Working Principle Of Magnetic Actuatormentioning

confidence: 99%

“…Optical fiber based devices have also been widely used for optical amplitude modulator (Fang and Taylor 1994;Lee et al 1997;Matias et al 2001) and imaging (Boppart et al 1997;Nelson et al 1997;Sedlar et al 2000;Popovic et al 1996;Keplinger et al 2003). Variable fiber-optic-based devices have been developed with piezoelectric (Herding et al 2004), electrostatic (Hoffmann et al 1999;Cochran et al 2004), thermal (Nagaoka 1999;Bernstein et al 2004;Comtois et al 1997), and electromagnetic (Deeter 1995;Tearney et al 1996;Dhaubanjar 2006;Sendoh et al 2003) actuations. In general, thermal actuation devices have higher power consumption while piezoelectric and electrostatic devices require high voltages.…”

Section: Introductionmentioning

confidence: 99%

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A Magnetic Actuator for Fiber-Optic Applications

Pandojirao-Sunkojirao

Rao

Phuyal

et al. 2009

International Journal of Optomechatronics

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Optical fibers coated with various non-magnetized ferromagnetic materials and actuated by external magnetic fields were designed and characterized to demonstrate the feasibility for remote scanning. Cobalt, iron, nickel, and samarium-cobalt powders were used to enable the actuation. Silica optical fibers were coated with a mixture of 70% enamel paint and 30% various ferromagnetic materials. The static and dynamic measurements were preformed under the remote control of an electromagnet. Experiments with different ferromagnetic materials and different suspended fiber lengths of 3.2 cm, 4.2 cm, 5.2 cm, 6.2 cm, and 7.2 cm were performed to compare with theory. The static displacements, dynamic displacements and resonant frequencies of the actuation were measured.

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Section: Working Principle Of Magnetic Actuatormentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Magnetic Actuator for Fiber-Optic Applications

Pandojirao-Sunkojirao

Rao

Phuyal

et al. 2009

International Journal of Optomechatronics

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“…The thermal expansion is most commonly caused through Joule heating by passing a current through thin actuator beams. There are two different thermal actuator designs that have been demonstrated and commonly used in the literature, the pseudobimorph or "U" shaped actuator [1][2][3][4], and the bent-beam or "V" shaped actuator [5][6][7][8][9]. Both designs amplify the small input displacement created by thermal expansion, at the expense of a reduction in the available output force.…”

Section: Thermal Actuator Designsmentioning

confidence: 99%

Final report : compliant thermo-mechanical MEMS actuators, LDRD #52553.

Walraven¹,

Baker²,

Headley³

et al. 2004

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Thermal actuators have proven to be a robust actuation method in surface-micromachined MEMS processes. Their higher output force and lower input voltage make them an attractive alternative to more traditional electrostatic actuation methods. A predictive model of thermal actuator behavior has been developed and validated that can be used as a design tool to customize the performance of an actuator to a specific application. This tool has also been used to better understand thermal actuator reliability by comparing the maximum actuator temperature to the measured lifetime.Modeling thermal actuator behavior requires the use of two sequentially coupled models, the first to predict the temperature increase of the actuator due to the applied current and the second to model the mechanical response of the structure due to the increase in temperature. These two models have been developed using Matlab for the thermal response and ANSYS for the structural response. Both models have been shown to agree well with experimental data. 3In a parallel effort, the reliability and failure mechanisms of thermal actuators have been studied. Their response to electrical overstress and electrostatic discharge has been measured and a study has been performed to determine actuator lifetime at various temperatures and operating conditions. The results from this study have been used to determine a maximum reliable operating temperature that, when used in conjunction with the predictive model, enables us to design in reliability and customize the performance of an actuator at the design stage. AcknowledgmentThe authors would like to thank all of the staff in the MDL for fabrication and release/dry/coat support through out this project. We would also like to thank Ken Pohl, Mark Jenkins and David Luck for their assistance in testing and characterization, Mike Rye for TEM sample preparation, and Hoshang (Amir) Shahvar and Ted Parson for their work in getting SHiMMeR operational and configured for this experiment. Also, thanks to Sean Kearney and Leslie Phinney for their work in collecting the Raman temperature data.4

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“…As the thermal expansion of the active member in a thermal actuator is very small, a displacement amplification mechanism is usually needed. This amplification can be obtained using a V-shaped (chevron) actuator [4,10] or a heatuator-like actuator [2,3,11], for example. Both types of actuators are relatively long and using them in a latching switch generally results in a large L-shaped switch taking up a lot of chip area (Fig.…”

Section: Introductionmentioning

confidence: 99%

Compact thermally actuated latching MEMS switch with large contact force

Dellaert

Doutreloigne

2015

Electron. lett.

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A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact configuration of thermal actuators. In the proposed latching mechanism, the necessary displacement of one of the contacts can be reduced, allowing the use of a linear thermal actuator. This linear actuator together with a V-shaped actuator can be aligned next to each other, requiring less area than the classical latching switch design. Another advantage of the proposed design is the high contact force of 1.33 mN, ensuring a stable contact resistance. The latching switch was fabricated in the Metal multi-user MEMS processes (MUMPs) technology and its functionality was successfully tested. In the latched state, a switch resistance of 0.6 Ω was measured

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Characterization of electrothermal actuators and arrays fabricated in a four-level, planarized surface-micromachined polycrystalline silicon process

Cited by 34 publications

References 2 publications

A Magnetic Actuator for Fiber-Optic Applications

A Magnetic Actuator for Fiber-Optic Applications

Final report : compliant thermo-mechanical MEMS actuators, LDRD #52553.

Compact thermally actuated latching MEMS switch with large contact force

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