Characterization of MEMS FTIR spectrometer

Khalil, Diaa; Sabry, Yasser M.; Omran, Haitham; Medhat, Mostafa; Hafez, A.; Saadany, Bassam

doi:10.1117/12.876124

Cited by 30 publications

(19 citation statements)

References 11 publications

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“…Another promising approach for on‐chip broadband spectrometers uses micro‐electro‐mechanical systems (MEMS) technology combined with Fourier transform infrared spectroscopy . These devices are usually fabricated via deep‐etching in silicon and are therefore not suitable for applications in the visible wavelength range.…”

Section: Introductionmentioning

confidence: 99%

Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Hartmann

Varytis

Gehring

et al. 2020

Advanced Optical Materials

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Compact, on‐chip spectrometers exploiting tailored disorder for broadband light scattering enable high‐resolution signal analysis while maintaining a small device footprint. Due to multiple scattering events of light in the disordered medium, the effective path length of the device is significantly enhanced. Here, on‐chip spectrometers are realized for visible and near‐infrared wavelengths by combining an efficient broadband fiber‐to‐chip coupling approach with a scattering area in a broadband transparent silicon nitride waveguiding structure. Air holes etched into a structured silicon nitride slab terminated with multiple waveguides enable multipath light scattering in a diffusive regime. Spectral‐to‐spatial mapping is performed by determining the transmission matrix at the waveguide outputs, which is then used to reconstruct the probe signals. Direct comparison with theoretical analyses shows that such devices can be used for high‐resolution spectroscopy from the visible up to the telecom wavelength regime.

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Section: Introductionmentioning

confidence: 99%

Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Hartmann

Varytis

Gehring

et al. 2020

Advanced Optical Materials

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“…This creates a nonuniqueness problem and uncertainty for the extracted physical parameters of the actuator, which affects the following technology tuning and optimization. Direct extraction for the equivalent circuit parameters from the analysis of the measured physical data was proposed . The advantage of the technique arises from its ability to always arrive at a unique solution with physically correct values.…”

Section: Characterization Methodsmentioning

confidence: 99%

“…Indeed, a broad range of miniaturized optical devices has been implemented combining one or more of the micro‐optical component together with MEMS actuators. More specifically, variable optical attenuators , optical tunable filters , optical delay lines , grating, Michelson, Mach–Zehnder as well as Fabry–Pérot interferometers , optical cavities , external cavity tunable lasers , Fourier‐transform spectrometry and more recently integrated wide‐angle microscanners and swept laser sources . The special interest in SOI micro‐optical benches is a consequence of their small size, low fabrication cost, self‐alignment and integrability that serve the needs of miniaturized optical instruments.…”

Section: Drie‐fabricated Optical Bench Building‐block Componentsmentioning

confidence: 99%

Monolithic silicon‐micromachined free‐space optical interferometers onchip

Sabry

Khalil

Bourouina

2014

Laser & Photonics Reviews

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The integration of microactuators within a silicon photonic chip gave rise to the field of optical micro‐electro‐mechanical systems (MEMS) that was originally driven by the telecommunication market. Following the latter's bubble collapse in the beginning of the third millennium, new directions of research with considerable momentum appeared focusing on the realization and applications of miniaturized instrumentation in biology, chemistry, physics and materials science. At the heart of these applications light interferometry is a key optical phenomenon, in which miniaturized scanning interferometers are the manipulating optical devices. Monolithic free‐space optical interferometers realized on a silicon chip take advantage of the recent progress in the microfabrication technology that is enabling accurate control of the etching depth, the aspect ratio, the verticality and the curvature of the etched surfaces. The fabrication technology, the library of micro‐optical and mechanical components, the realized architectures and their characterization are described in detail in this review, followed by a discussion of the foreseen challenges.

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“…The maximum OPD achieved by the comb-drive actuator is around 130 μm per side of the zero optical path difference position, which corresponds to a 3 dB-resolution in the order of 46.5 nm [26,27]. Resolution of a spectrometer can be determined from the measured spectrum of a laser beam.…”

Section: Spectrometer Resolutionmentioning

confidence: 99%

MMI-based MOEMS FT spectrometer for visible and IR spectral ranges

et al. 2014

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MEMS spectrometers have very strong potential in future healthcare and environmental monitoring applications, where Michelson interferometers are the core optical engine. Recently, MEMS Michelson interferometers based on using silicon interface as a beam splitter (BS) has been proposed [7,8]. This allows having a monolithically-integrated on-chip FTIR spectrometer. However silicon BS exhibits high absorption loss in the visible range and high material dispersion in the near infrared (NIR) range. For this reason, we propose in this work a novel MOEMS interferometer allowing operation over wider spectral range covering both the infrared (IR) and the visible ranges. The proposed architecture is based on spatial splitting and combining of optical beams using the imaging properties of Multi-Mode Interference MMI waveguide. The proposed structure includes an optical splitter for spatial splitting an input beam into two beams and a combiner for spatial combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the two beams. The new interferometer is fabricated using DRIE technology on an SOI wafer. The movable mirror is metalized and attached to a comb-drive actuator fabricated in the same lithography step in a self-aligned manner on chip. The novel interferometer is tested as a Fourier transform spectrometer. Red laser, IR laser and absorption spectra of different materials are measured with a resolution of 2.5 nm at 635-nm wavelength. The structure is a very compact one that allows its integration and fabrication on a large scale with very low cost.

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Characterization of MEMS FTIR spectrometer

Cited by 30 publications

References 11 publications

Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Waveguide‐Integrated Broadband Spectrometer Based on Tailored Disorder

Monolithic silicon‐micromachined free‐space optical interferometers onchip

MMI-based MOEMS FT spectrometer for visible and IR spectral ranges

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